キーワード: MEMS

20 件のレコードが見つかりました。

edtm2025-paper-template-word_Liao 10.26.pdf
Single-Crystal Diamond MEMS for Extreme Sensors
プロシーディングス論文
著者
ORCID SAMURAI
キーワード
Diamond, MEMS, sensors
刊行年月日
2025-03-09
更新時刻
2025-07-29 16:30:25 +0900

Maunscript (Clean).docx
Low-Energy Dissipation Diamond MEMS
ジャーナル論文
著者
Guo Chen (author) (この著者で検索)
;
Satoshi Koizumi (author) (この著者で検索)
ORCID SAMURAI ;
Yasuo Koide (author) (この著者で検索)
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
2024-09-27
更新時刻
2025-07-29 08:30:21 +0900

NDNC2025_abstract_Chen.docx
High Quality Factor Single-Crystal Diamond NEMS Cantilevers Fabricated by A Smart-Cut Method
会議発表ポスター
著者
Guo Chen (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Wen Zhao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Keyun Gu (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Satoshi Koizumi (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
Yasuo Koide (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Next-generation Semiconductor Group
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
更新時刻
2025-05-22 08:30:08 +0900

30-Manuscript-WEN_2025-Liao 20250114.docx
Ultra‐High Sensitivity, Wide‐Range Thermometry Based on High‐Quality Microscale Diamond Resonators
ジャーナル論文
著者
Wen Zhao (author) (この著者で検索)
ORCID ;
Guo Chen (author) (この著者で検索)
ORCID ; ORCID SAMURAI ;
Yasuo Koide (author) (この著者で検索)
;
Masaya Toda (author) (この著者で検索)
; ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
2025-07-28
更新時刻
2025-10-28 12:30:23 +0900

Revised chapter-20230509 -new.docx
Single-Crystal Diamond MEMS Magnetic Sensor
書籍
著者
Zilong Zhang (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
Diamond, MEMS, magnetic sensors
刊行年月日
2024-05-22
更新時刻
2024-10-21 12:30:45 +0900

Zhang_MEMS2025_202415-submit.docx
Diamond MEMS Magnetic Force Sensor Toward Femtonewton at Room Temperature
プロシーディングス論文
著者
Zilong Zhang (author) (この著者で検索)
;
Zhijian Zhao (author) (この著者で検索)
; ORCID SAMURAI ;
Takahito Ono (author) (この著者で検索)
;
Masaya Toda (author) (この著者で検索)
キーワード
Diamond, MEMS, magnetic sensors
刊行年月日
2025-01-19
更新時刻
2025-11-13 16:30:04 +0900

NDNC2025_abstract_template -WEN_Finalized Zhao_Liao.docx
Ultra-High-Resolution Thermometer Based on Diamond MEMS
プレゼンテーション
著者
Wen Zhao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Tokuyuki Teraji (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Optical Materials Field/Semiconductor Defect Design Group
ORCID SAMURAI ;
Satoshi Koizumi (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
Yasuo Koide (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
更新時刻
2025-05-22 08:30:40 +0900

2024 NEMS ZHANG-20240220.doc
Diamond NEMS Resonators for Real-Time Dual Sensing of Magnetic Fields and Temperatures up to 500°C
プロシーディングス論文
著者
Zilong Zhang (author) (この著者で検索)
;
Keyun Gu (author) (この著者で検索)
;
Guo Chen (author) (この著者で検索)
; ORCID SAMURAI ; ORCID SAMURAI ; ORCID SAMURAI
キーワード
Diamond, MEMS, magnetic sensors
刊行年月日
2024-05-02
更新時刻
2025-01-25 08:30:41 +0900

manuscript.pdf
20.1 A 3.5×3.5mm2 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack
ジャーナル論文
著者
Kotaro Naruse (author) (この著者で検索)
;
Naru Kato (author) (この著者で検索)
;
Takuma Matsumori (author) (この著者で検索)
;
Jun Shlomi (author) (この著者で検索)
;
Yoshihiro Midoh (author) (この著者で検索)
;
Tetsuya Hirose (author) (この著者で検索)
;
Gaku Imamura (author) (この著者で検索)
ORCID SAMURAI ;
Genki Yoshikawa (author) (この著者で検索)
ORCID SAMURAI ;
Constantine Sideris (author) (この著者で検索)
;
Noriyuki Miura (author) (この著者で検索)
キーワード
gas sensor, CMOS, MEMS
刊行年月日
2025-02-16
更新時刻
2025-12-25 16:21:05 +0900

4.29 Characterization of diamond MEMS cantilevers mitigating substrate interference effects _Liao.docx
Optical properties of single-crystal diamond MEMS: mitigating substrate interference
ジャーナル論文
著者
Keyun Gu (author) (この著者で検索)
ORCID ;
Zilong Zhang (author) (この著者で検索)
;
Zhaozong Zhang (author) (この著者で検索)
ORCID ;
Jian Huang (author) (この著者で検索)
; ORCID SAMURAI ; ORCID SAMURAI ; ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
2025-12-31
更新時刻
2025-10-28 12:30:30 +0900