MDR: NIMS Materials Data Repository

キーワード: MEMS

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30 件のレコードが見つかりました。 1件目から10件目まで表示します。

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Characterization of Young’s Modulus Anisotropy of Single-Crystal Diamond

プレゼンテーション
著者: Zhaozong Zhang (author) (この著者で検索)

https://orcid.org/0009-0003-8745-4469 (unauthenticated)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Wen Zhao (author) (この著者で検索)

https://orcid.org/0000-0001-8159-8195 (unauthenticated)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Guo Chen (author) (この著者で検索)

https://orcid.org/0009-0004-9263-5616 (unauthenticated)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Satoshi Koizumi (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI
キーワード: Diamond, MEMS
刊行年月日
更新時刻: 2025-11-06 12:30:27 +0900

Effect of Ultra-High Vacuum Annealing and Hydrogen Plasma Treatment on the Resonance Properties of Single-Crystal Diamond MEMS Cantilevers

プロシーディングス論文
著者: Guo Chen (author) (この著者で検索)

https://orcid.org/0009-0004-9263-5616 (unauthenticated)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Zilong Zhang (author) (この著者で検索)

https://orcid.org/0000-0002-9759-9253

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Liwen Sang (author) (この著者で検索)

https://orcid.org/0000-0003-0946-1025

National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Quantum Materials Field/Thin Film Electronics Group

;

Yasuo Koide (author) (この著者で検索)

https://orcid.org/0000-0001-8321-9822

National Institute for Materials Science Research Center for Electronic and Optical Materials

NIMS Researchers Directory SAMURAI

;

Satoshi Koizumi (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI
キーワード: Diamond, MEMS
刊行年月日
更新時刻: 2026-10-13 16:46:48 +0900

4.29 Characterization of diamond MEMS cantilevers mitigating substrate interference effects _Liao.docx

Optical properties of single-crystal diamond MEMS: mitigating substrate interference

ジャーナル論文
著者: Keyun Gu (author) (この著者で検索)

https://orcid.org/0000-0002-7505-7744 (unauthenticated)

;

Zilong Zhang (author) (この著者で検索)

;

Zhaozong Zhang (author) (この著者で検索)

https://orcid.org/0009-0003-8745-4469 (unauthenticated)

;

Jian Huang (author) (この著者で検索)

;

Yasuo Koide (author) (この著者で検索)

https://orcid.org/0000-0001-8321-9822

NIMS Researchers Directory SAMURAI

;

Satoshi Koizumi (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

NIMS Researchers Directory SAMURAI
キーワード: Diamond, MEMS
刊行年月日: 2025-12-31
更新時刻: 2025-10-28 12:30:30 +0900

Oshima_2025_Appl._Phys._Express_18_116501-1.pdf

Fabrication of β -Ga ₂ O ₃ /air-gap structures on (010) β -Ga ₂ O ₃ by wet etching in tetramethylammonium hydroxide (TMAH)

ジャーナル論文
著者: Takayoshi Oshima (author) (この著者で検索)

https://orcid.org/0000-0001-8550-9735

NIMS Researchers Directory SAMURAI
キーワード: Ga2O3, TMAH, wet etching, MEMS
刊行年月日: 2025-11-01
更新時刻: 2025-11-27 08:30:13 +0900

Low-Energy Dissipation Diamond MEMS

ジャーナル論文
著者: Guo Chen (author) (この著者で検索)

;

Satoshi Koizumi (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

;

Yasuo Koide (author) (この著者で検索)

https://orcid.org/0000-0001-8321-9822

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science

NIMS Researchers Directory SAMURAI
キーワード: Diamond, MEMS
刊行年月日: 2024-09-27
更新時刻: 2025-07-29 08:30:21 +0900

Electrical Readout of Single-Crystal Diamond MEMS Resonators for Infrared Sensing

プロシーディングス論文
著者: Guo Chen (author) (この著者で検索)

https://orcid.org/0009-0004-9263-5616 (unauthenticated)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Zhaozong Zhang (author) (この著者で検索)

https://orcid.org/0009-0003-8745-4469 (unauthenticated)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Satoshi Koizumi (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI
キーワード: Diamond, MEMS
刊行年月日
更新時刻: 2026-10-14 11:38:06 +0900

2025 03 15 APL mauscript of H-1 desorption.docx

Surface desorption properties of hydrogen-terminated diamond detected by micromechanical resonator

ジャーナル論文
著者: Keyun Gu (author) (この著者で検索)

https://orcid.org/0000-0002-7505-7744 (unauthenticated)

;

Zilong Zhang (author) (この著者で検索)

https://orcid.org/0000-0002-9759-9253

;

Jian Huang (author) (この著者で検索)

https://orcid.org/0000-0002-1268-8899 (unauthenticated)

;

Yasuo Koide (author) (この著者で検索)

https://orcid.org/0000-0001-8321-9822

NIMS Researchers Directory SAMURAI

;

Satoshi Koizumi (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

NIMS Researchers Directory SAMURAI
キーワード: Diamond, surface conductivity, MEMS
刊行年月日: 2025-06-02
更新時刻: 2025-07-14 12:30:29 +0900

Developing nickel-catalyzed graphene/diamond heterostructures for MEMS applications

プレゼンテーション
著者: Guo Chen (author) (この著者で検索)

https://orcid.org/0009-0004-9263-5616 (unauthenticated)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Wen Zhao (author) (この著者で検索)

https://orcid.org/0000-0001-8159-8195 (unauthenticated)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Zhaozong Zhang (author) (この著者で検索)

https://orcid.org/0009-0003-8745-4469 (unauthenticated)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Satoshi KOIZUMI (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI
キーワード: Diamond, MEMS
刊行年月日
更新時刻: 2025-11-06 12:30:32 +0900

Abstract Oxygen-termination effect R.doc

Effect of Oxygen Terminal Surface Adsorption Layer on Energy Dissipation in Single-Crystal Diamond MEMS

プレゼンテーション
著者: Keyun Gu (author) (この著者で検索)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Zilong Zhang (author) (この著者で検索)

https://orcid.org/0000-0002-9759-9253

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Wen Zhao (author) (この著者で検索)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Guo Chen (author) (この著者で検索)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Jian Huang (author) (この著者で検索)

China University of Geosciences

;

Satoshi Koizumi (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI

;

Yasuo Koide (author) (この著者で検索)

https://orcid.org/0000-0001-8321-9822

National Institute for Materials Science Research Center for Electronic and Optical Materials

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI
キーワード: ダイヤモンド, MEMS
刊行年月日
更新時刻: 2025-04-12 08:30:28 +0900