Keyword: MEMS
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32 records found. Displaying records 1 to 10.

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Effect of Energy Dissipation in Higher-Order Resonance on SCD MEMS Cantilevers Toward High f·Q
Conference paper
Creator
Guo Chen (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID ;
Zilong Zhang (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID ;
Keyun Gu (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Satoshi Koizum (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID SAMURAI ;
Zhaohui Huang (author) (Search by this author)
China University of Geosciences
;
Meiyong Liao (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID SAMURAI
Keyword
Diamond, MEMS
Date published
Updated at
2026-10-13 16:51:23 +0900
Effect of Ultra-High Vacuum Annealing and Hydrogen Plasma Treatment on the Resonance Properties of Single-Crystal Diamond MEMS Cantilevers
Conference paper
Creator
Guo Chen (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID ;
Zilong Zhang (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID ;
Liwen Sang (author) (Search by this author)
Research Center for Materials Nanoarchitectonics (MANA)/Quantum Materials Field/Thin Film Electronics Group, National Institute for Materials Science
ORCID ;
Yasuo Koide (author) (Search by this author)
Research Center for Electronic and Optical Materials, National Institute for Materials Science
ORCID SAMURAI ;
Satoshi Koizumi (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID SAMURAI ;
Meiyong Liao (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID SAMURAI
Keyword
Diamond, MEMS
Date published
Updated at
2026-10-13 16:46:48 +0900
Air Damping Effect on Quality-Factor in High-Order Resonance Modes of Single-Crystal Diamond Microcantilevers
Conference paper
Creator
Guo Chen (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID ;
Zilong Zhang (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID ;
Keyun G (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Liwen Sang (author) (Search by this author)
Research Center for Materials Nanoarchitectonics (MANA)/Quantum Materials Field/Thin Film Electronics Group, National Institute for Materials Science
ORCID ;
Satoshi Koizumi (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID SAMURAI ;
Yasuo Koide (author) (Search by this author)
Research Center for Electronic and Optical Materials, National Institute for Materials Science
ORCID SAMURAI ;
Zhaohui Huang (author) (Search by this author)
China University of Geosciences
;
Meiyong Liao (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID SAMURAI
Keyword
Diamond, MEMS
Date published
Updated at
2026-10-13 16:40:16 +0900
High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures
Conference paper
Creator
Guo Chen (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID ;
Zilong Zhang (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID ;
Keyun Gu (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Liwen Sang (author) (Search by this author)
Research Center for Materials Nanoarchitectonics (MANA)/Quantum Materials Field/Thin Film Electronics Group, National Institute for Materials Science
ORCID ;
Satoshi Koizumi (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID SAMURAI ;
Masaya Toda (author) (Search by this author)
Graduate School of Engineering, Tohoku University
;
Yasuo Koide (author) (Search by this author)
Research Center for Electronic and Optical Materials, National Institute for Materials Science
ORCID SAMURAI ;
Zhaohui Huang (author) (Search by this author)
China University of Geosciences
;
Meiyong Liao (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID SAMURAI
Keyword
Diamond, MEMS
Date published
Updated at
2026-10-13 17:16:05 +0900
Ultrathin Diamond NEMS Cantilevers with Enhanced Frequency Stability for High-Sensitivity Mass Sensing
Conference poster
Creator
Guo Chen (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID ;
Wen Zhao (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID ;
Zhaozong Zhang (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID ;
Satoshi Koizumi (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID SAMURAI ;
Meiyong Liao (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID SAMURAI
Keyword
Diamond, MEMS
Date published
Updated at
2026-10-13 10:07:38 +0900
Ultrathin Single-Crystal Diamond NEMS Cantilevers for High-Sensitivity Nanomechanical Sensing
Conference paper
Creator
G. Chen (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID ;
W. Zhao (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID ;
Z. Zhang (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID ;
S. Koizumi (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID SAMURAI ;
M. Liao (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID SAMURAI
Keyword
Diamond, MEMS
Date published
Updated at
2026-10-13 17:00:44 +0900
20.1 A 3.5×3.5mm2 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack
Journal article
Creator
Kotaro Naruse (author) (Search by this author)
;
Naru Kato (author) (Search by this author)
;
Takuma Matsumori (author) (Search by this author)
;
Jun Shlomi (author) (Search by this author)
;
Yoshihiro Midoh (author) (Search by this author)
;
Tetsuya Hirose (author) (Search by this author)
;
Gaku Imamura (author) (Search by this author)
National Institute for Materials Science
ORCID SAMURAI ;
Genki Yoshikawa (author) (Search by this author)
National Institute for Materials Science
ORCID SAMURAI ;
Constantine Sideris (author) (Search by this author)
;
Noriyuki Miura (author) (Search by this author)
Keyword
gas sensor, CMOS, MEMS
Date published
2025-02-16
Updated at
2025-12-25 16:21:05 +0900
Fabrication of β -Ga 2 O 3 /air-gap structures on (010) β -Ga 2 O 3 by wet etching in tetramethylammonium hydroxide (TMAH)
Journal article
Creator
ORCID SAMURAI
Keyword
Ga2O3, TMAH, wet etching, MEMS
Date published
2025-11-01
Updated at
2025-11-27 08:30:13 +0900
Diamond MEMS Magnetic Force Sensor Toward Femtonewton at Room Temperature
Conference paper
Creator
Zilong Zhang (author) (Search by this author)
;
Zhijian Zhao (author) (Search by this author)
; ORCID SAMURAI ;
Takahito Ono (author) (Search by this author)
;
Masaya Toda (author) (Search by this author)
Keyword
Diamond, MEMS, magnetic sensors
Date published
2025-01-19
Updated at
2025-11-13 16:30:04 +0900
Optical properties of single-crystal diamond MEMS: mitigating substrate interference
Journal article
Creator
Keyun Gu (author) (Search by this author)
ORCID ;
Zilong Zhang (author) (Search by this author)
;
Zhaozong Zhang (author) (Search by this author)
ORCID ;
Jian Huang (author) (Search by this author)
; ORCID SAMURAI ; ORCID SAMURAI ; ORCID SAMURAI
Keyword
Diamond, MEMS
Date published
2025-12-31
Updated at
2025-10-28 12:30:30 +0900
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