Keyword: MEMS
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26 records found.

manuscript.pdf
20.1 A 3.5×3.5mm2 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack
Article
Creator
Kotaro Naruse ; Naru Kato ; Takuma Matsumori ; Jun Shlomi ; Yoshihiro Midoh ; Tetsuya Hirose ; Gaku Imamura SAMURAI ORCID ; Genki Yoshikawa SAMURAI ORCID ; Constantine Sideris ; Noriyuki Miura
Keyword
gas sensor, CMOS, MEMS
Date published
2025-02-16
Updated at
2025-12-25 16:21:05 +0900
Oshima_2025_Appl._Phys._Express_18_116501-1.pdf
Fabrication of β -Ga 2 O 3 /air-gap structures on (010) β -Ga 2 O 3 by wet etching in tetramethylammonium hydroxide (TMAH)
Article
Creator
Takayoshi Oshima SAMURAI ORCID
Keyword
Ga2O3, TMAH, wet etching, MEMS
Date published
2025-11-01
Updated at
2025-11-27 08:30:13 +0900
Zhang_MEMS2025_202415-submit.docx
Diamond MEMS Magnetic Force Sensor Toward Femtonewton at Room Temperature
Proceedings
Creator
Zilong Zhang ; Zhijian Zhao ; Meiyong Liao SAMURAI ORCID ; Takahito Ono ; Masaya Toda
Keyword
Diamond, MEMS, magnetic sensors
Date published
2025-01-19
Updated at
2025-11-13 16:30:04 +0900
4.29 Characterization of diamond MEMS cantilevers mitigating substrate interference effects _Liao.docx
Optical properties of single-crystal diamond MEMS: mitigating substrate interference
Article
Creator
Keyun Gu ORCID ; Zilong Zhang ; Zhaozong Zhang ORCID ; Jian Huang ; Yasuo Koide SAMURAI ORCID ; Satoshi Koizumi SAMURAI ORCID ; Meiyong Liao SAMURAI ORCID
Keyword
Diamond, MEMS
Date published
2025-12-31
Updated at
2025-10-28 12:30:30 +0900
30-Manuscript-WEN_2025-Liao 20250114.docx
Ultra‐High Sensitivity, Wide‐Range Thermometry Based on High‐Quality Microscale Diamond Resonators
Article
Creator
Wen Zhao ORCID ; Guo Chen ORCID ; Tokuyuki Teraji SAMURAI ORCID ; Yasuo Koide ; Masaya Toda ; Meiyong Liao SAMURAI ORCID
Keyword
Diamond, MEMS
Date published
2025-07-28
Updated at
2025-10-28 12:30:23 +0900
3-Abstract-WEN Liao.docx
High-quality Factor Diamond MEMS Resonators for Ultra-precise Thermometry
Presentation
Creator
Wen Zhao ORCID ; Guo Chen ORCID ; Zhaozong Zhang ORCID ; Satoshi KOIZUMI SAMURAI ORCID ; Meiyong Liao SAMURAI ORCID
Keyword
Diamond,, MEMS
Date published
Updated at
2026-01-09 11:00:08 +0900
NIMS張兆宗abstract Liao.docx
単結晶ダイヤモンドにおけるヤング率の定量評価と異方性解析
Presentation
Creator
張 兆宗 ORCID ; ザオ ウェン ORCID ; 陳 果 ORCID ; 小泉 聡 SAMURAI ORCID ; 廖 梅勇 SAMURAI ORCID
Keyword
Diamond, MEMS
Date published
Updated at
2025-11-06 12:30:37 +0900
JSAP 2025 Abstract-chen_Liao.doc
Developing nickel-catalyzed graphene/diamond heterostructures for MEMS applications
Presentation
Creator
Guo Chen ORCID ; Wen Zhao ORCID ; Zhaozong Zhang ORCID ; Satoshi KOIZUMI SAMURAI ORCID ; Meiyong Liao SAMURAI ORCID
Keyword
Diamond, MEMS
Date published
Updated at
2025-11-06 12:30:32 +0900
abstract Zhang_Liao.docx
Characterization of Young’s Modulus Anisotropy of Single-Crystal Diamond
Presentation
Creator
Zhaozong Zhang ORCID ; Wen Zhao ORCID ; Guo Chen ORCID ; Satoshi Koizumi SAMURAI ORCID ; Meiyong Liao SAMURAI ORCID
Keyword
Diamond, MEMS
Date published
Updated at
2025-11-06 12:30:27 +0900
Fabrication of -Ga2O3 air-gap structures on 001 -Ga2O3 using HCl gas etching.pdf
Fabrication of β-Ga 2 O 3 /air-gap structures on (001) β-Ga 2 O 3 using HCl gas etching
Article
Creator
Takayoshi Oshima SAMURAI ORCID ; Yuichi Oshima SAMURAI ORCID
Keyword
β-Ga2O3, cantilever, air bridge, MEMS
Date published
2025-12-31
Updated at
2025-09-04 12:30:25 +0900