Resource type: journal_article Keyword: MEMS
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12 records found.

manuscript.pdf
20.1 A 3.5×3.5mm2 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack
Article
Creator
Kotaro Naruse ; Naru Kato ; Takuma Matsumori ; Jun Shlomi ; Yoshihiro Midoh ; Tetsuya Hirose ; Gaku Imamura SAMURAI ORCID ; Genki Yoshikawa SAMURAI ORCID ; Constantine Sideris ; Noriyuki Miura
Keyword
gas sensor, CMOS, MEMS
Date published
2025-02-16
Updated at
2025-12-25 16:21:05 +0900
Oshima_2025_Appl._Phys._Express_18_116501-1.pdf
Fabrication of β -Ga 2 O 3 /air-gap structures on (010) β -Ga 2 O 3 by wet etching in tetramethylammonium hydroxide (TMAH)
Article
Creator
Takayoshi Oshima SAMURAI ORCID
Keyword
Ga2O3, TMAH, wet etching, MEMS
Date published
2025-11-01
Updated at
2025-11-27 08:30:13 +0900
4.29 Characterization of diamond MEMS cantilevers mitigating substrate interference effects _Liao.docx
Optical properties of single-crystal diamond MEMS: mitigating substrate interference
Article
Creator
Keyun Gu ORCID ; Zilong Zhang ; Zhaozong Zhang ORCID ; Jian Huang ; Yasuo Koide SAMURAI ORCID ; Satoshi Koizumi SAMURAI ORCID ; Meiyong Liao SAMURAI ORCID
Keyword
Diamond, MEMS
Date published
2025-12-31
Updated at
2025-10-28 12:30:30 +0900
30-Manuscript-WEN_2025-Liao 20250114.docx
Ultra‐High Sensitivity, Wide‐Range Thermometry Based on High‐Quality Microscale Diamond Resonators
Article
Creator
Wen Zhao ORCID ; Guo Chen ORCID ; Tokuyuki Teraji SAMURAI ORCID ; Yasuo Koide ; Masaya Toda ; Meiyong Liao SAMURAI ORCID
Keyword
Diamond, MEMS
Date published
2025-07-28
Updated at
2025-10-28 12:30:23 +0900
Fabrication of -Ga2O3 air-gap structures on 001 -Ga2O3 using HCl gas etching.pdf
Fabrication of β-Ga 2 O 3 /air-gap structures on (001) β-Ga 2 O 3 using HCl gas etching
Article
Creator
Takayoshi Oshima SAMURAI ORCID ; Yuichi Oshima SAMURAI ORCID
Keyword
β-Ga2O3, cantilever, air bridge, MEMS
Date published
2025-12-31
Updated at
2025-09-04 12:30:25 +0900
041124_1_5.0250902-min.pdf
High-order resonance enhancing the mass sensitivity of diamond cantilevers
Article
Creator
Wen Zhao ORCID ; Guo Chen ORCID ; Keyun Gu ORCID ; Masaya Toda ; Yasuo Koide SAMURAI ORCID ; Meiyong Liao SAMURAI ORCID
Keyword
Diamond, MEMS
Date published
2025-04-01
Updated at
2025-07-12 08:30:35 +0900
5 Uploaded Manuscript__WEN-DRM.docx
Frequency stability improvement of single-crystal diamond cantilever utilizing higher-order-mode excitation
Article
Creator
Wen Zhao ; Guo Chen ; Zhaozong Zhang ORCID ; Satoshi Koizumi SAMURAI ORCID ; Meiyong Liao SAMURAI ORCID
Keyword
Diamond, MEMS
Date published
2025-06-26
Updated at
2025-07-11 16:30:21 +0900
2025 03 15 APL mauscript of H-1 desorption.docx
Surface desorption properties of hydrogen-terminated diamond detected by micromechanical resonator
Article
Creator
Keyun Gu ORCID ; Zilong Zhang ORCID ; Jian Huang ORCID ; Yasuo Koide SAMURAI ORCID ; Satoshi Koizumi SAMURAI ORCID ; Meiyong Liao SAMURAI ORCID
Keyword
Diamond, surface conductivity, MEMS
Date published
2025-06-02
Updated at
2025-07-14 12:30:29 +0900
perspective-20241226.pdf
A perspective on diamond MEMS magnetic sensors
Article
Creator
Zilong Zhang ORCID ; Keyun Gu ; Masaya Toda ORCID ; Meiyong Liao SAMURAI ORCID
Keyword
Diamond, MEMS, magnetic sensors
Date published
2025-03-01
Updated at
2025-05-19 16:30:19 +0900
Maunscript (Clean).docx
Low-Energy Dissipation Diamond MEMS
Article
Creator
Guo Chen ; Satoshi Koizumi SAMURAI ORCID ; Yasuo Koide SAMURAI ORCID ; Meiyong Liao SAMURAI ORCID
Keyword
Diamond, MEMS
Date published
2024-09-27
Updated at
2025-07-29 08:30:21 +0900