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Article and Dataset
Collection
Resource type
Journal article(12)
Keyword
GaN (4)
thin film (2)
transmission electron microscopy (2)
Amorphous indium oxide, (1)
Atomic layer deposition (1)
BEOL compatible (1)
High vacuum Annealing (1)
Indium oxide (1)
Molecular dynamics simulation (1)
Oxide (1)
(more)
License
Creative Commons BY Attribution 4.0 International (7)
In Copyright (3)
Creative Commons BY-NC Attribution-NonCommercial 4.0 International (1)
Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International (1)
File type
application/pdf (12)
12 records found.
Atomic Layer Deposition of Polycrystalline Tin Dioxide Thin Films Using Liquid Bis(ethylcyclopentadienyl)tin
Journal article
Creator
Fumikazu MIZUTANI
(author) (
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)
Fumikazu MIZUTANI
;
Nobutaka TAKAHASHI
(author) (
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)
Nobutaka TAKAHASHI
;
Toshihide NABATAME
(author) (
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)
https://orcid.org/0000-0002-5973-0230
NIMS Researchers Directory SAMURAI
Toshihide NABATAME
Keyword
Atomic layer deposition
,
PEALD
,
Poricrystaline SnO2
Date published
2025-12-01
Updated at
2026-04-30 12:01:11 +0900
Atomic-scale observation of native oxides on
c
- and
m
-faced GaN surfaces
Journal article
Creator
Jun Uzuhashi
(author) (
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)
https://orcid.org/0000-0003-2023-8158
NIMS Researchers Directory SAMURAI
Jun Uzuhashi
;
Yoshihiro Irokawa
(author) (
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)
https://orcid.org/0000-0002-6531-4356
NIMS Researchers Directory SAMURAI
Yoshihiro Irokawa
;
Toshihide Nabatame
(author) (
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)
https://orcid.org/0000-0002-5973-0230
NIMS Researchers Directory SAMURAI
Toshihide Nabatame
;
Yasuo Koide
(author) (
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)
Yasuo Koide
;
Tadakatsu Ohkubo
(author) (
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)
https://orcid.org/0000-0003-3548-1951
NIMS Researchers Directory SAMURAI
Tadakatsu Ohkubo
Keyword
transmission electron microscopy
,
gallium nitride
Date published
2026-04-01
Updated at
2026-04-02 10:10:21 +0900
Observation of Atomic-Scale Structural Changes in Al
2
O
3
/GaN Interfacial Layers Prepared with a Dummy-SiO
2
Process
Journal article
Creator
Jun Uzuhashi
(author) (
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)
https://orcid.org/0000-0003-2023-8158
NIMS Researchers Directory SAMURAI
Jun Uzuhashi
;
Yoshihiro Irokawa
(author) (
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)
https://orcid.org/0000-0002-6531-4356
NIMS Researchers Directory SAMURAI
Yoshihiro Irokawa
;
Toshihide Nabatame
(author) (
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)
https://orcid.org/0000-0002-5973-0230
NIMS Researchers Directory SAMURAI
Toshihide Nabatame
;
Tadakatsu Ohkubo
(author) (
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)
https://orcid.org/0000-0003-3548-1951
NIMS Researchers Directory SAMURAI
Tadakatsu Ohkubo
;
Yasuo Koide
(author) (
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)
Yasuo Koide
Keyword
transmission electron microscopy
,
metal-oxide-semiconductor
Date published
2025-08-01
Updated at
2025-08-26 11:15:20 +0900
Oxygen reduction for p-type TeOx thin-film transistor
Journal article
Creator
Seiichi Kato
(author) (
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)
https://orcid.org/0000-0002-6427-5463
MANA, NIMS
NIMS Researchers Directory SAMURAI
Seiichi Kato
;
Masayuki Okamura
(author) (
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)
https://orcid.org/0009-0003-3636-6653
(unauthenticated)
MANA, NIMS
Masayuki Okamura
;
Tomomi Sawada
(author) (
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)
https://orcid.org/0000-0002-2335-4480
(unauthenticated)
MANA, NIMS
Tomomi Sawada
;
Toshihide Nabatame
(author) (
Search by this author
)
https://orcid.org/0000-0002-5973-0230
MANA, NIMS
NIMS Researchers Directory SAMURAI
Toshihide Nabatame
;
Kazuhito Tsukagoshi
(author) (
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)
https://orcid.org/0000-0001-9710-2692
MANA, NIMS
NIMS Researchers Directory SAMURAI
Kazuhito Tsukagoshi
Keyword
oxide transistor
,
p-type TFT
,
TeOx
,
BEOL compatible
,
reducing agent
,
tungsten
Date published
2026-05-25
Updated at
2026-06-09 17:58:56 +0900
Investigation of Deep States in GaN Metal-Oxide-Semiconductor Interfaces
Journal article
Creator
Yoshihiro Irokawa
(author) (
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)
https://orcid.org/0000-0002-6531-4356
NIMS Researchers Directory SAMURAI
Yoshihiro Irokawa
;
Mamoru Usami
(author) (
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)
https://orcid.org/0009-0002-3188-7380
(unauthenticated)
Mamoru Usami
;
Jun Uzuhashi
(author) (
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)
https://orcid.org/0000-0003-2023-8158
NIMS Researchers Directory SAMURAI
Jun Uzuhashi
;
Tadakatsu Ohkubo
(author) (
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)
https://orcid.org/0000-0003-3548-1951
NIMS Researchers Directory SAMURAI
Tadakatsu Ohkubo
;
Toshihide Nabatame
(author) (
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)
https://orcid.org/0000-0002-5973-0230
NIMS Researchers Directory SAMURAI
Toshihide Nabatame
;
Yasuo Koide
(author) (
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)
https://orcid.org/0000-0001-8321-9822
NIMS Researchers Directory SAMURAI
Yasuo Koide
Keyword
GaN
Date published
2026-05-01
Updated at
2026-05-13 10:14:20 +0900
Compositional changes between metastable SnO and stable SnO2 in a sputtered film for p-type thin-film transistors
Journal article
Creator
Yong-Lie Sun
(author) (
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)
https://orcid.org/0000-0003-1113-1658
Yong-Lie Sun
;
Toshihide Nabatame
(author) (
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)
Toshihide Nabatame
;
Jong Won Chung
(author) (
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)
https://orcid.org/0000-0002-9799-7438
(unauthenticated)
Jong Won Chung
;
Tomomi Sawada
(author) (
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)
Tomomi Sawada
;
Hiromi Miura
(author) (
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)
Hiromi Miura
;
Manami Miyamoto
(author) (
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)
Manami Miyamoto
;
Kazuhito Tsukagoshi
(author) (
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)
https://orcid.org/0000-0001-9710-2692
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Kazuhito Tsukagoshi
Keyword
p-type SnO
,
Thin-film transistors
,
Sputtering
,
High vacuum Annealing
Date published
2024-10-09
Updated at
2024-10-15 16:30:30 +0900
Communication—A Powerful Method to Improve Dielectric/GaN Interface Properties: A Dummy SiO
2
Process
Journal article
Creator
Yoshihiro Irokawa
(author) (
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)
https://orcid.org/0000-0002-6531-4356
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yoshihiro Irokawa
;
Toshihide Nabatame
(author) (
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)
https://orcid.org/0000-0002-5973-0230
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Toshihide Nabatame
;
Tomomi Sawada
(author) (
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)
National Institute for Materials Science
Tomomi Sawada
;
Manami Miyamoto
(author) (
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)
Manami Miyamoto
;
Hiromi Miura
(author) (
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)
Hiromi Miura
;
Kazuhito Tsukagoshi
(author) (
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)
https://orcid.org/0000-0001-9710-2692
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Kazuhito Tsukagoshi
;
Yasuo Koide
(author) (
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)
https://orcid.org/0000-0001-8321-9822
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yasuo Koide
Keyword
GaN
Date published
2024-08-01
Updated at
2024-09-02 12:30:27 +0900
A three-step surface treatment and its impacts on electrical properties of c- and m-face GaN/Al2O3 MOS structures
Journal article
Creator
Masahiro Hara
(author) (
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)
https://orcid.org/0000-0001-9748-8011
(unauthenticated)
Masahiro Hara
;
Toshihide Nabatame
(author) (
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)
https://orcid.org/0000-0002-5973-0230
NIMS Researchers Directory SAMURAI
Toshihide Nabatame
;
Yoshihiro Irokawa
(author) (
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)
https://orcid.org/0000-0002-6531-4356
NIMS Researchers Directory SAMURAI
Yoshihiro Irokawa
;
Tomomi Sawada
(author) (
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)
Tomomi Sawada
;
Manami Miyamoto
(author) (
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)
Manami Miyamoto
;
Hiromi Miura
(author) (
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)
Hiromi Miura
;
Tsunenobu Kimoto
(author) (
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)
Tsunenobu Kimoto
;
Yasuo Koide
(author) (
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)
Yasuo Koide
Keyword
GaN
Date published
2025-05-07
Updated at
2025-05-08 12:30:16 +0900
Oxygen-pressure driven balancing of interface and bulk scattering in amorphous oxide semiconductor thin-film transistors
Journal article
Creator
Che-Yi Lin
(author) (
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)
Che-Yi Lin
;
Yu-Ching Kuo
(author) (
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)
https://orcid.org/0009-0008-1978-4016
(unauthenticated)
Yu-Ching Kuo
;
I-Chen Liu
(author) (
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)
I-Chen Liu
;
Feng-Shou Yang
(author) (
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)
Feng-Shou Yang
;
Yuan-Ming Chang
(author) (
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)
Yuan-Ming Chang
;
Po-Wen Chiu
(author) (
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)
Po-Wen Chiu
;
Toshihide Nabatame
(author) (
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)
Toshihide Nabatame
;
Mengjiao Li
(author) (
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)
Mengjiao Li
;
Kazuhito Tsukagoshi
(author) (
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)
https://orcid.org/0000-0001-9710-2692
NIMS Researchers Directory SAMURAI
Kazuhito Tsukagoshi
;
Yen-Fu Lin
(author) (
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)
https://orcid.org/0000-0002-1545-9143
(unauthenticated)
Yen-Fu Lin
Keyword
Oxide
,
thin film
,
transistor
Date published
2025-09-05
Updated at
2025-09-26 17:46:31 +0900
Exploring high-symmetry structures in non-Cartesian coordinates: preparation and characteristics of cylindrically symmetric-rotating crystals
Journal article
Creator
Bo Da
(author) (
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)
https://orcid.org/0000-0002-0785-8662
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Bo Da
;
Long Cheng
(author) (
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)
https://orcid.org/0000-0001-9599-2257
(unauthenticated)
Long Cheng
;
Xun Liu
(author) (
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)
Xun Liu
;
Kunji Shigeto
(author) (
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)
Kunji Shigeto
;
Zihang Zhang
(author) (
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)
Zihang Zhang
;
Kazuhito Tsukagoshi
(author) (
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)
https://orcid.org/0000-0001-9710-2692
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Kazuhito Tsukagoshi
;
Toshihide Nabatame
(author) (
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)
https://orcid.org/0000-0002-5973-0230
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Toshihide Nabatame
;
Zejun Ding
(author) (
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)
https://orcid.org/0000-0001-5767-1145
(unauthenticated)
Zejun Ding
;
Jiangwei Liu
(author) (
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)
https://orcid.org/0000-0003-2580-7401
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Jiangwei Liu
;
Hideki Yoshikawa
(author) (
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)
https://orcid.org/0000-0002-7389-8865
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Hideki Yoshikawa
;
Shigeo Tanuma
(author) (
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)
Shigeo Tanuma
Keyword
cylindrically symmetric-rotating crystals
,
SEM
,
thin film
,
Indium oxide
Date published
2024-12-31
Updated at
2024-11-13 08:30:53 +0900
Keyword
GaN
(4)
thin film
(2)
transmission electron microscopy
(2)
Amorphous indium oxide,
(1)
Atomic layer deposition
(1)
BEOL compatible
(1)
High vacuum Annealing
(1)
Indium oxide
(1)
Molecular dynamics simulation
(1)
Oxide
(1)
PEALD
(1)
Poricrystaline SnO2
(1)
Reverse Monte Carlo
(1)
SEM
(1)
Sputtering
(1)
TeOx
(1)
Thermal stability
(1)
Thin-film transistors
(1)
Topological analysis
(1)
X-ray diffraction
(1)
cylindrically symmetric-rotating crystals
(1)
gallium nitride
(1)
metal-oxide-semiconductor
(1)
oxide transistor
(1)
p-type SnO
(1)
p-type TFT
(1)
reducing agent
(1)
transistor
(1)
tungsten
(1)
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RDE invoice schema
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