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Article and Dataset
Collection
Resource type
Journal article(10)
Keyword
HVPE (10)
ELO (4)
Ga2O3 (4)
α-Ga2O3 (3)
dislocation (2)
ε-Ga2O3 (2)
κ-Ga2O3 (2)
(−112) (1)
Cr2O3 (1)
HCl gas etching (1)
(more)
License
In Copyright (7)
Creative Commons BY Attribution 4.0 International (3)
File type
application/pdf (10)
Keyword: HVPE
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In-plane orientation control of (001) κ-Ga2O3 by epitaxial lateral overgrowth through a geometrical natural selection mechanism
Journal article
Creator
Yuichi Oshima
(author) (
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)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Katsuaki Kawara
(author) (
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)
Katsuaki Kawara
;
Takayoshi Oshima
(author) (
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)
Takayoshi Oshima
;
Takashi Shinohe
(author) (
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)
Takashi Shinohe
Keyword
κ-Ga2O3
,
ε-Ga2O3
,
ELO
,
domain
,
HVPE
Date published
2020-11-01
Updated at
2024-01-22 09:39:14 +0900
Epitaxial Lateral Overgrowth of c-plane α-Ga2O3 using a stripe mask with ultra-narrow windows
Journal article
Creator
Yuichi Oshima
(author) (
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)
https://orcid.org/0000-0001-8293-4891
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Takashi Shinohe
(author) (
Search by this author
)
FLOSFIA INC.
Takashi Shinohe
Keyword
Ga2O3
,
dislocation
,
HVPE
,
ELO
Date published
2025-05-19
Updated at
2025-05-21 16:30:09 +0900
Epitaxial growth of phase-pure e-Ga2O3 by halide vapor phase epitaxy
Journal article
Creator
Yuichi Oshima
(author) (
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)
https://orcid.org/0000-0001-8293-4891
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Encarnación G. Víllora
(author) (
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)
Encarnación G. Víllora
;
Yoshitaka Matsushita
(author) (
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)
https://orcid.org/0000-0002-4968-8905
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yoshitaka Matsushita
;
Satoshi Yamamoto
(author) (
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)
https://orcid.org/0000-0002-1171-7723
National Institute for Materials Science
Satoshi Yamamoto
;
Kiyoshi Shimamura
(author) (
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)
https://orcid.org/0000-0001-6502-8731
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Kiyoshi Shimamura
Keyword
κ-Ga2O3
,
ε-Ga2O3
,
HVPE
Date published
2015-08-28
Updated at
2024-01-30 15:45:38 +0900
Phase-controlled epitaxial lateral overgrowth of α-Ga2O3 by halide vapor phase epitaxy
Journal article
Creator
Yuichi Oshima
(author) (
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)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Katsuaki Kawara
(author) (
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)
Katsuaki Kawara
;
Takayoshi Oshima
(author) (
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)
Takayoshi Oshima
;
Mitsuru Okigawa
(author) (
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)
Mitsuru Okigawa
;
Takashi Shinohe
(author) (
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)
Takashi Shinohe
Keyword
α-Ga2O3
,
ELO
,
HVPE
Date published
2020-02-01
Updated at
2024-01-22 09:41:33 +0900
Epitaxial lateral overgrowth of r-plane α-Ga2O3 with stripe masks along -12-10>
Journal article
Creator
Yuichi Oshima
(author) (
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)
https://orcid.org/0000-0001-8293-4891
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Shingo Yagyu
(author) (
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)
Shingo Yagyu
;
Takashi Shinohe
(author) (
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)
Takashi Shinohe
Keyword
α-Ga2O3
,
HVPE
,
dislocation
,
ELO
Date published
2021-11-07
Updated at
2024-01-30 16:49:49 +0900
Halide vapor phase epitaxy of a thick
c
-plane α-Ga2O3 film on a high-quality α-Cr2O3/sapphire template
Journal article
Creator
Yuichi Oshima
(author) (
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)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Takayoshi Oshima
(author) (
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)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Shiyu Xiao
(author) (
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)
https://orcid.org/0009-0007-0382-0396
(unauthenticated)
Shiyu Xiao
;
Kazuto Murakami
(author) (
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)
Kazuto Murakami
;
Katsuhiro Imai
(author) (
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)
Katsuhiro Imai
;
Takahiro Tomita
(author) (
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)
Takahiro Tomita
Keyword
Ga2O3
,
HVPE
,
Cr2O3
Date published
2026-02-21
Updated at
2026-02-18 16:30:15 +0900
HCl-based halide vapor phase epitaxy and selective-area HCl gas etching of (−112) β-Ga
2
O
3
Journal article
Creator
Takayoshi Oshima
(author) (
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)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Yuichi Oshima
(author) (
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)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
Keyword
Ga2O3
,
(−112)
,
HVPE
,
HCl gas etching
Date published
2026-12-31
Updated at
2026-07-16 10:12:49 +0900
Rapid homoepitaxial growth of (011) β-Ga
2
O
3
by HCl-based halide vapor phase epitaxy
Journal article
Creator
Yuichi Oshima
(author) (
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)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Takayoshi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
Keyword
Ga2O3
,
HVPE
Date published
2025-12-31
Updated at
2025-11-28 08:30:04 +0900
Rapid growth of α-Ga2O3 by HCl-boosted halide vapor phase epitaxy and effect of precursor supply conditions on crystal properties
Journal article
Creator
Yuichi Oshima
(author) (
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)
Yuichi Oshima
;
Katsuaki Kawara
(author) (
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)
Katsuaki Kawara
;
Takayoshi Oshima
(author) (
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)
Takayoshi Oshima
;
Mitsuru Okigawa
(author) (
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)
Mitsuru Okigawa
;
Takashi Shinohe
(author) (
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)
Takashi Shinohe
Keyword
α-Ga2O3
,
HVPE
Date published
2020-05-01
Updated at
2024-01-22 09:40:57 +0900
Homoepitaxial growth of (-102) β-Ga2O3 by halide vapor phase epitaxy
Journal article
Creator
Yuichi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8293-4891
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Takayoshi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
Keyword
β-Ga2O3
,
HVPE
Date published
2023-10-01
Updated at
2024-08-31 08:31:17 +0900
Keyword
HVPE
(10)
ELO
(4)
Ga2O3
(4)
α-Ga2O3
(3)
dislocation
(2)
ε-Ga2O3
(2)
κ-Ga2O3
(2)
(−112)
(1)
Cr2O3
(1)
HCl gas etching
(1)
domain
(1)
β-Ga2O3
(1)
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Filter
Collection
Resource type
Journal article(10)
Keyword
HVPE (10)
ELO (4)
Ga2O3 (4)
α-Ga2O3 (3)
dislocation (2)
ε-Ga2O3 (2)
κ-Ga2O3 (2)
(−112) (1)
Cr2O3 (1)
HCl gas etching (1)
(more)
License
In Copyright (7)
Creative Commons BY Attribution 4.0 International (3)
File type
application/pdf (10)