キーワード: MEMS

26 件のレコードが見つかりました。

2-NEW Diamond Forum-Wen Liao R.docx
Frequency Stability of Higher Order Modes Diamond MEMS Resonator
プレゼンテーション
著者
ザオ ウェン (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
顧 克云 (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
陳 果 (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
ジャン ジロン (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
小泉 聡 (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
小出 康夫 (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials
ORCID SAMURAI ;
廖 梅勇 (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
更新時刻
2024-12-05 08:30:52 +0900

Maunscript (Clean).docx
Low-Energy Dissipation Diamond MEMS
ジャーナル論文
著者
Guo Chen (author) (この著者で検索)
;
Satoshi Koizumi (author) (この著者で検索)
ORCID SAMURAI ;
Yasuo Koide (author) (この著者で検索)
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
2024-09-27
更新時刻
2025-07-29 08:30:21 +0900

Revised chapter-20230509 -new.docx
Single-Crystal Diamond MEMS Magnetic Sensor
書籍
著者
Zilong Zhang (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
Diamond, MEMS, magnetic sensors
刊行年月日
2024-05-22
更新時刻
2024-10-21 12:30:45 +0900

Revised Maunscript (clean version) .pdf
Disclosing the annihilation effect of ion-implantation induced defects in single-crystal diamond by resonant MEMS
ジャーナル論文
著者
Guo Chen (author) (この著者で検索)
;
Zilong Zhang (author) (この著者で検索)
;
Yasuo Koide (author) (この著者で検索)
;
Satoshi Koizumi (author) (この著者で検索)
;
Zhaohui Huang (author) (この著者で検索)
;
Meiyong Liao (author) (この著者で検索)
ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
2023-07-26
更新時刻
2025-07-26 08:30:34 +0900

AFM-resonator_sensor-20230307 .pdf
On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film
ジャーナル論文
著者
Zilong Zhang (author) (この著者で検索)
National Institute for Materials Science
ORCID ;
Wen Zhao (author) (この著者で検索)
;
Guo Chen (author) (この著者で検索)
National Institute for Materials Science
;
Masaya Toda (author) (この著者で検索)
;
Satoshi Koizumi (author) (この著者で検索)
ORCID SAMURAI ;
Yasuo Koide (author) (この著者で検索)
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
ORCID SAMURAI
キーワード
Diamond, MEMS, Magnetic sensors
刊行年月日
2023-03-27
更新時刻
2024-07-04 16:30:34 +0900

[Vol. 68]New GaN MEMS Resonator Is Temperature-Stable up to 600 K_ WPI-MANA.pdf
[Research Highlights Vol.68] New GaN MEMS Resonator Is Temperature-Stable up to 600 K
雑誌
コレクション
Research Highlights
著者
International Center for Materials Nanoarchitectonics (WPI-MANA) (author) (この著者で検索)
National Institute for Materials Science
キーワード
GaN, MEMS, NEMS, energy storage, temperature coefficient of frequency, AlN, Si, Strain
刊行年月日
2021-07-13
更新時刻
2023-12-26 21:38:08 +0900