プレゼンテーション Frequency Stability of Higher Order Modes Diamond MEMS Resonator
ザオ ウェン (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
顧 克云 (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
陳 果 (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
ジャン ジロン (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
小泉 聡 (author) (この著者で検索)
ORCID https://orcid.org/0000-0003-4961-5658
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
SAMURAI NIMS Researchers Directory SAMURAI
ORCID SAMURAI ;
小出 康夫 (author) (この著者で検索)
ORCID https://orcid.org/0000-0001-8321-9822
National Institute for Materials Science Research Center for Electronic and Optical Materials
SAMURAI NIMS Researchers Directory SAMURAI
ORCID SAMURAI ;
廖 梅勇 (author) (この著者で検索)
ORCID https://orcid.org/0000-0003-1361-4266
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
SAMURAI NIMS Researchers Directory SAMURAI
ORCID SAMURAI
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引用
ザオ ウェン, 顧 克云, 陳 果, ジャン ジロン, 小泉 聡, 小出 康夫, 廖 梅勇. Frequency Stability of Higher Order Modes Diamond MEMS Resonator. https://doi.org/10.48505/nims.5088

代替タイトル: 高次モードダイヤモンドMEMS共振センサーの周波数安定性研究

説明:

(abstract)

In this work, we propose the use of high-order mode resonance for sensing applications, which can maintain the device mass and increase the band width simultaneously. We analyze the frequency stability of the high-order mode resonance of diamond MEMS cantilevers. It is shown that the higher-order mode resonance improves the frequency stability.

権利情報:

キーワード: Diamond, MEMS

会議: 第３８回ダイヤモンドシンポジウム (2024-11-20 - 2024-11-22)

研究助成金:

原稿種別: 論文以外のデータ

MDR DOI: https://doi.org/10.48505/nims.5088

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更新時刻: 2024-12-05 08:30:52 +0900

MDRでの公開時刻: 2024-12-05 08:30:52 +0900

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