ザオ ウェン (Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science) ; 顧 克云 (Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science) ; 陳 果 (Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science) ; ジャン ジロン (Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science) ; 小泉 聡 (Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science) ; 小出 康夫 (Research Center for Electronic and Optical Materials, National Institute for Materials Science) ; 廖 梅勇 (Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science)

Download file (1.02MB)
Download as zip (909KB)

コレクション

引用

ザオ ウェン, 顧 克云, 陳 果, ジャン ジロン, 小泉 聡, 小出 康夫, 廖 梅勇. Frequency Stability of Higher Order Modes Diamond MEMS Resonator. https://doi.org/10.48505/nims.5088

(BibTeX)

代替タイトル: 高次モードダイヤモンドMEMS共振センサーの周波数安定性研究

説明:

(abstract)

In this work, we propose the use of high-order mode resonance for sensing applications, which can maintain the device mass and increase the band width simultaneously. We analyze the frequency stability of the high-order mode resonance of diamond MEMS cantilevers. It is shown that the higher-order mode resonance improves the frequency stability.

権利情報:

• In Copyright
  

キーワード: Diamond, MEMS

会議: 第３８回ダイヤモンドシンポジウム (2024-11-20 - 2024-11-22)

研究助成金:

原稿種別: 論文以外のデータ

MDR DOI: https://doi.org/10.48505/nims.5088

公開URL:

関連資料:

その他の識別子:

連絡先:

更新時刻: 2024-12-05 08:30:52 +0900

MDRでの公開時刻: 2024-12-05 08:30:52 +0900

ファイル名	サイズ
ファイル名	2-NEW Diamond Forum-Wen Liao R.docx (サムネイル) application/vnd.openxmlformats-officedocument.wordprocessingml.document	サイズ	1.02MB	詳細