ザオ ウェン (Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science) ; 顧 克云 (Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science) ; 陳 果 (Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science) ; ジャン ジロン (Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science) ; 小泉 聡 (Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science) ; 小出 康夫 (Research Center for Electronic and Optical Materials, National Institute for Materials Science) ; 廖 梅勇 (Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science)

Download file (1.02 MB)
Download as zip (909 KB)

Collection

Citation

ザオ ウェン, 顧 克云, 陳 果, ジャン ジロン, 小泉 聡, 小出 康夫, 廖 梅勇. Frequency Stability of Higher Order Modes Diamond MEMS Resonator. https://doi.org/10.48505/nims.5088

(BibTeX)

Alternative title: 高次モードダイヤモンドMEMS共振センサーの周波数安定性研究

Description:

(abstract)

In this work, we propose the use of high-order mode resonance for sensing applications, which can maintain the device mass and increase the band width simultaneously. We analyze the frequency stability of the high-order mode resonance of diamond MEMS cantilevers. It is shown that the higher-order mode resonance improves the frequency stability.

Rights:

• In Copyright
  

Keyword: Diamond, MEMS

Conference: 第３８回ダイヤモンドシンポジウム (2024-11-20 - 2024-11-22)

Funding:

Manuscript type: Not a journal article

MDR DOI: https://doi.org/10.48505/nims.5088

First published URL:

Related item:

Other identifier(s):

Contact agent:

Updated at: 2024-12-05 08:30:52 +0900

Published on MDR: 2024-12-05 08:30:52 +0900

Filename	Size
Filename	2-NEW Diamond Forum-Wen Liao R.docx (Thumbnail) application/vnd.openxmlformats-officedocument.wordprocessingml.document	Size	1.02 MB	Detail