@misc{unknown-a,
  title = {Frequency Stability of Higher Order Modes Diamond MEMS Resonator},
  author = {ザオ ウェン, 顧 克云, 陳 果, ジャン ジロン, 小泉 聡, 小出 康夫, 廖 梅勇},
  publisher = {},
  year = {},
  keywords = {Diamond, MEMS}
}