MDR: NIMS Materials Data Repository

キーワード: MEMS

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26 件のレコードが見つかりました。

edtm2025-paper-template-word_Liao 10.26.pdf

Single-Crystal Diamond MEMS for Extreme Sensors

プロシーディングス論文
著者: Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

NIMS Researchers Directory SAMURAI
キーワード: Diamond, MEMS, sensors
刊行年月日: 2025-03-09
更新時刻: 2025-07-29 16:30:25 +0900

High-order resonance enhancing the mass sensitivity of diamond cantilevers

ジャーナル論文
著者: Wen Zhao (author) (この著者で検索)

https://orcid.org/0000-0001-8159-8195 (unauthenticated)

;

Guo Chen (author) (この著者で検索)

https://orcid.org/0009-0004-9263-5616 (unauthenticated)

;

Keyun Gu (author) (この著者で検索)

https://orcid.org/0000-0002-7505-7744 (unauthenticated)

;

Masaya Toda (author) (この著者で検索)

;

Yasuo Koide (author) (この著者で検索)

https://orcid.org/0000-0001-8321-9822

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

NIMS Researchers Directory SAMURAI
キーワード: Diamond, MEMS
刊行年月日: 2025-04-01
更新時刻: 2025-07-12 08:30:35 +0900

Frequency stability improvement of single-crystal diamond cantilever utilizing higher-order-mode excitation

ジャーナル論文
著者: Wen Zhao (author) (この著者で検索)

;

Guo Chen (author) (この著者で検索)

;

Zhaozong Zhang (author) (この著者で検索)

https://orcid.org/0009-0003-8745-4469 (unauthenticated)

;

Satoshi Koizumi (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

NIMS Researchers Directory SAMURAI
キーワード: Diamond, MEMS
刊行年月日: 2025-06-26
更新時刻: 2025-07-11 16:30:21 +0900

2025 03 15 APL mauscript of H-1 desorption.docx

Surface desorption properties of hydrogen-terminated diamond detected by micromechanical resonator

ジャーナル論文
著者: Keyun Gu (author) (この著者で検索)

https://orcid.org/0000-0002-7505-7744 (unauthenticated)

;

Zilong Zhang (author) (この著者で検索)

https://orcid.org/0000-0002-9759-9253

;

Jian Huang (author) (この著者で検索)

https://orcid.org/0000-0002-1268-8899 (unauthenticated)

;

Yasuo Koide (author) (この著者で検索)

https://orcid.org/0000-0001-8321-9822

NIMS Researchers Directory SAMURAI

;

Satoshi Koizumi (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

NIMS Researchers Directory SAMURAI
キーワード: Diamond, surface conductivity, MEMS
刊行年月日: 2025-06-02
更新時刻: 2025-07-14 12:30:29 +0900

A perspective on diamond MEMS magnetic sensors

ジャーナル論文
著者: Zilong Zhang (author) (この著者で検索)

https://orcid.org/0000-0002-9759-9253

;

Keyun Gu (author) (この著者で検索)

;

Masaya Toda (author) (この著者で検索)

https://orcid.org/0000-0003-3849-6948 (unauthenticated)

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

NIMS Researchers Directory SAMURAI
キーワード: Diamond, MEMS, magnetic sensors
刊行年月日: 2025-03-01
更新時刻: 2025-05-19 16:30:19 +0900

NDNC2025_abstract_template -WEN_Finalized　Zhao_Liao.docx

Ultra-High-Resolution Thermometer Based on Diamond MEMS

プレゼンテーション
著者: Wen Zhao (author) (この著者で検索)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Tokuyuki Teraji (author) (この著者で検索)

https://orcid.org/0000-0002-7731-0547

National Institute for Materials Science Research Center for Electronic and Optical Materials/Optical Materials Field/Semiconductor Defect Design Group

NIMS Researchers Directory SAMURAI

;

Satoshi Koizumi (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI

;

Yasuo Koide (author) (この著者で検索)

https://orcid.org/0000-0001-8321-9822

National Institute for Materials Science Research Center for Electronic and Optical Materials

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI
キーワード: Diamond, MEMS
刊行年月日
更新時刻: 2025-05-22 08:30:40 +0900

Revealing the Surface Adsorbates of Diamond Using MEMS Resonators

会議発表ポスター
著者: Keyun Gu (author) (この著者で検索)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Zilong Zhang (author) (この著者で検索)

https://orcid.org/0000-0002-9759-9253

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Wen Zhao (author) (この著者で検索)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Guo Chen (author) (この著者で検索)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Yasuo Koide (author) (この著者で検索)

https://orcid.org/0000-0001-8321-9822

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Next-generation Semiconductor Group

NIMS Researchers Directory SAMURAI

;

Satoshi Koizumi (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI
キーワード: Diamond, MEMS
刊行年月日
更新時刻: 2025-05-22 08:30:23 +0900

High Quality Factor Single-Crystal Diamond NEMS Cantilevers Fabricated by A Smart-Cut Method

会議発表ポスター
著者: Guo Chen (author) (この著者で検索)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Wen Zhao (author) (この著者で検索)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Keyun Gu (author) (この著者で検索)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Satoshi Koizumi (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI

;

Yasuo Koide (author) (この著者で検索)

https://orcid.org/0000-0001-8321-9822

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Next-generation Semiconductor Group

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI
キーワード: Diamond, MEMS
刊行年月日
更新時刻: 2025-05-22 08:30:08 +0900

Abstract Oxygen-termination effect R.doc

Effect of Oxygen Terminal Surface Adsorption Layer on Energy Dissipation in Single-Crystal Diamond MEMS

プレゼンテーション
著者: Keyun Gu (author) (この著者で検索)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Zilong Zhang (author) (この著者で検索)

https://orcid.org/0000-0002-9759-9253

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Wen Zhao (author) (この著者で検索)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Guo Chen (author) (この著者で検索)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Jian Huang (author) (この著者で検索)

China University of Geosciences

;

Satoshi Koizumi (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI

;

Yasuo Koide (author) (この著者で検索)

https://orcid.org/0000-0001-8321-9822

National Institute for Materials Science Research Center for Electronic and Optical Materials

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI
キーワード: ダイヤモンド, MEMS
刊行年月日
更新時刻: 2025-04-12 08:30:28 +0900

Diamond NEMS Resonators for Real-Time Dual Sensing of Magnetic Fields and Temperatures up to 500°C

プロシーディングス論文
著者: Zilong Zhang (author) (この著者で検索)

;

Keyun Gu (author) (この著者で検索)

;

Guo Chen (author) (この著者で検索)

;

Yasuo Koide (author) (この著者で検索)

https://orcid.org/0000-0001-8321-9822

NIMS Researchers Directory SAMURAI

;

Satoshi Koizumi (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

NIMS Researchers Directory SAMURAI
キーワード: Diamond, MEMS, magnetic sensors
刊行年月日: 2024-05-02
更新時刻: 2025-01-25 08:30:41 +0900

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