26 records found.
20.1 A 3.5×3.5mm2 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack
- Journal article
- Creator
-
;Kotaro Naruse (author) (Search by this author);Naru Kato (author) (Search by this author);Takuma Matsumori (author) (Search by this author);Jun Shlomi (author) (Search by this author);Yoshihiro Midoh (author) (Search by this author);Tetsuya Hirose (author) (Search by this author)Gaku Imamura (author) (Search by this author)National Institute for Materials Science
;
Genki Yoshikawa (author) (Search by this author)National Institute for Materials Science
;
;Constantine Sideris (author) (Search by this author)Noriyuki Miura (author) (Search by this author) - Keyword
- gas sensor, CMOS, MEMS
- Date published
- 2025-02-16
- Updated at
- 2025-12-25 16:21:05 +0900
Fabrication of β -Ga 2 O 3 /air-gap structures on (010) β -Ga 2 O 3 by wet etching in tetramethylammonium hydroxide (TMAH)
- Journal article
- Creator
-
Takayoshi Oshima (author) (Search by this author)
- Keyword
- Ga2O3, TMAH, wet etching, MEMS
- Date published
- 2025-11-01
- Updated at
- 2025-11-27 08:30:13 +0900
Diamond MEMS Magnetic Force Sensor Toward Femtonewton at Room Temperature
- Conference paper
- Creator
-
;Zilong Zhang (author) (Search by this author);Zhijian Zhao (author) (Search by this author)Meiyong Liao (author) (Search by this author)
;
;Takahito Ono (author) (Search by this author)Masaya Toda (author) (Search by this author)
- Keyword
- Diamond, MEMS, magnetic sensors
- Date published
- 2025-01-19
- Updated at
- 2025-11-13 16:30:04 +0900
Optical properties of single-crystal diamond MEMS: mitigating substrate interference
- Journal article
- Creator
-
Keyun Gu (author) (Search by this author)
https://orcid.org/0000-0002-7505-7744
(unauthenticated)
;
;Zilong Zhang (author) (Search by this author)Zhaozong Zhang (author) (Search by this author)
https://orcid.org/0009-0003-8745-4469
(unauthenticated)
;
;Jian Huang (author) (Search by this author)Yasuo Koide (author) (Search by this author)
;
Satoshi Koizumi (author) (Search by this author)
;
Meiyong Liao (author) (Search by this author)
- Keyword
- Diamond, MEMS
- Date published
- 2025-12-31
- Updated at
- 2025-10-28 12:30:30 +0900
Ultra‐High Sensitivity, Wide‐Range Thermometry Based on High‐Quality Microscale Diamond Resonators
- Journal article
- Creator
-
Wen Zhao (author) (Search by this author)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
;
Guo Chen (author) (Search by this author)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
;
Tokuyuki Teraji (author) (Search by this author)
;
;Yasuo Koide (author) (Search by this author);Masaya Toda (author) (Search by this author)Meiyong Liao (author) (Search by this author)
- Keyword
- Diamond, MEMS
- Date published
- 2025-07-28
- Updated at
- 2025-10-28 12:30:23 +0900
High-quality Factor Diamond MEMS Resonators for Ultra-precise Thermometry
- Conference presentation
- Creator
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Wen Zhao (author) (Search by this author)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Guo Chen (author) (Search by this author)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Zhaozong Zhang (author) (Search by this author)
https://orcid.org/0009-0003-8745-4469
(unauthenticated)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Satoshi KOIZUMI (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Meiyong Liao (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
- Keyword
- Diamond,, MEMS
- Date published
- Updated at
- 2026-01-09 11:00:08 +0900
単結晶ダイヤモンドにおけるヤング率の定量評価と異方性解析
- Conference presentation
- Creator
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張 兆宗 (author) (Search by this author)
https://orcid.org/0009-0003-8745-4469
(unauthenticated)
電子・光機能材料研究センター/機能材料分野/超ワイドギャップ半導体グループ, 物質・材料研究機構
;
ザオ ウェン (author) (Search by this author)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
電子・光機能材料研究センター/機能材料分野/超ワイドギャップ半導体グループ, 物質・材料研究機構
;
陳 果 (author) (Search by this author)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
電子・光機能材料研究センター/機能材料分野/超ワイドギャップ半導体グループ, 物質・材料研究機構
;
小泉 聡 (author) (Search by this author)電子・光機能材料研究センター/機能材料分野/超ワイドギャップ半導体グループ, 物質・材料研究機構
;
廖 梅勇 (author) (Search by this author)電子・光機能材料研究センター/機能材料分野/超ワイドギャップ半導体グループ, 物質・材料研究機構
- Keyword
- Diamond, MEMS
- Date published
- Updated at
- 2025-11-06 12:30:37 +0900
Developing nickel-catalyzed graphene/diamond heterostructures for MEMS applications
- Conference presentation
- Creator
-
Guo Chen (author) (Search by this author)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Wen Zhao (author) (Search by this author)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Zhaozong Zhang (author) (Search by this author)
https://orcid.org/0009-0003-8745-4469
(unauthenticated)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Satoshi KOIZUMI (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Meiyong Liao (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
- Keyword
- Diamond, MEMS
- Date published
- Updated at
- 2025-11-06 12:30:32 +0900
Characterization of Young’s Modulus Anisotropy of Single-Crystal Diamond
- Conference presentation
- Creator
-
Zhaozong Zhang (author) (Search by this author)
https://orcid.org/0009-0003-8745-4469
(unauthenticated)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Wen Zhao (author) (Search by this author)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Guo Chen (author) (Search by this author)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Satoshi Koizumi (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Meiyong Liao (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
- Keyword
- Diamond, MEMS
- Date published
- Updated at
- 2025-11-06 12:30:27 +0900
Fabrication of β-Ga 2 O 3 /air-gap structures on (001) β-Ga 2 O 3 using HCl gas etching
- Journal article
- Creator
-
Takayoshi Oshima (author) (Search by this author)
;
Yuichi Oshima (author) (Search by this author)
- Keyword
- β-Ga2O3, cantilever, air bridge, MEMS
- Date published
- 2025-12-31
- Updated at
- 2025-09-04 12:30:25 +0900