26 件のレコードが見つかりました。
20.1 A 3.5×3.5mm2 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack
- ジャーナル論文
- 著者
-
;Kotaro Naruse (author) (この著者で検索);Naru Kato (author) (この著者で検索);Takuma Matsumori (author) (この著者で検索);Jun Shlomi (author) (この著者で検索);Yoshihiro Midoh (author) (この著者で検索);Tetsuya Hirose (author) (この著者で検索)Gaku Imamura (author) (この著者で検索)National Institute for Materials Science
;
Genki Yoshikawa (author) (この著者で検索)National Institute for Materials Science
;
;Constantine Sideris (author) (この著者で検索)Noriyuki Miura (author) (この著者で検索) - キーワード
- gas sensor, CMOS, MEMS
- 刊行年月日
- 2025-02-16
- 更新時刻
- 2025-12-25 16:21:05 +0900
Fabrication of β -Ga 2 O 3 /air-gap structures on (010) β -Ga 2 O 3 by wet etching in tetramethylammonium hydroxide (TMAH)
- ジャーナル論文
- 著者
-
Takayoshi Oshima (author) (この著者で検索)
- キーワード
- Ga2O3, TMAH, wet etching, MEMS
- 刊行年月日
- 2025-11-01
- 更新時刻
- 2025-11-27 08:30:13 +0900
Optical properties of single-crystal diamond MEMS: mitigating substrate interference
- ジャーナル論文
- 著者
-
Keyun Gu (author) (この著者で検索)
https://orcid.org/0000-0002-7505-7744
(unauthenticated)
;
;Zilong Zhang (author) (この著者で検索)Zhaozong Zhang (author) (この著者で検索)
https://orcid.org/0009-0003-8745-4469
(unauthenticated)
;
;Jian Huang (author) (この著者で検索)Yasuo Koide (author) (この著者で検索)
;
Satoshi Koizumi (author) (この著者で検索)
;
Meiyong Liao (author) (この著者で検索)
- キーワード
- Diamond, MEMS
- 刊行年月日
- 2025-12-31
- 更新時刻
- 2025-10-28 12:30:30 +0900
Ultra‐High Sensitivity, Wide‐Range Thermometry Based on High‐Quality Microscale Diamond Resonators
- ジャーナル論文
- 著者
-
Wen Zhao (author) (この著者で検索)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
;
Guo Chen (author) (この著者で検索)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
;
Tokuyuki Teraji (author) (この著者で検索)
;
;Yasuo Koide (author) (この著者で検索);Masaya Toda (author) (この著者で検索)Meiyong Liao (author) (この著者で検索)
- キーワード
- Diamond, MEMS
- 刊行年月日
- 2025-07-28
- 更新時刻
- 2025-10-28 12:30:23 +0900
High-quality Factor Diamond MEMS Resonators for Ultra-precise Thermometry
- プレゼンテーション
- 著者
-
Wen Zhao (author) (この著者で検索)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Guo Chen (author) (この著者で検索)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Zhaozong Zhang (author) (この著者で検索)
https://orcid.org/0009-0003-8745-4469
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Satoshi KOIZUMI (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Meiyong Liao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
- キーワード
- Diamond,, MEMS
- 刊行年月日
- 更新時刻
- 2026-01-09 11:00:08 +0900
単結晶ダイヤモンドにおけるヤング率の定量評価と異方性解析
- プレゼンテーション
- 著者
-
張 兆宗 (author) (この著者で検索)
https://orcid.org/0009-0003-8745-4469
(unauthenticated)
物質・材料研究機構 電子・光機能材料研究センター/機能材料分野/超ワイドギャップ半導体グループ
;
ザオ ウェン (author) (この著者で検索)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
物質・材料研究機構 電子・光機能材料研究センター/機能材料分野/超ワイドギャップ半導体グループ
;
陳 果 (author) (この著者で検索)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
物質・材料研究機構 電子・光機能材料研究センター/機能材料分野/超ワイドギャップ半導体グループ
;
小泉 聡 (author) (この著者で検索)物質・材料研究機構 電子・光機能材料研究センター/機能材料分野/超ワイドギャップ半導体グループ
;
廖 梅勇 (author) (この著者で検索)物質・材料研究機構 電子・光機能材料研究センター/機能材料分野/超ワイドギャップ半導体グループ
- キーワード
- Diamond, MEMS
- 刊行年月日
- 更新時刻
- 2025-11-06 12:30:37 +0900
Developing nickel-catalyzed graphene/diamond heterostructures for MEMS applications
- プレゼンテーション
- 著者
-
Guo Chen (author) (この著者で検索)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Wen Zhao (author) (この著者で検索)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Zhaozong Zhang (author) (この著者で検索)
https://orcid.org/0009-0003-8745-4469
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Satoshi KOIZUMI (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Meiyong Liao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
- キーワード
- Diamond, MEMS
- 刊行年月日
- 更新時刻
- 2025-11-06 12:30:32 +0900
Characterization of Young’s Modulus Anisotropy of Single-Crystal Diamond
- プレゼンテーション
- 著者
-
Zhaozong Zhang (author) (この著者で検索)
https://orcid.org/0009-0003-8745-4469
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Wen Zhao (author) (この著者で検索)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Guo Chen (author) (この著者で検索)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Satoshi Koizumi (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Meiyong Liao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
- キーワード
- Diamond, MEMS
- 刊行年月日
- 更新時刻
- 2025-11-06 12:30:27 +0900
Fabrication of β-Ga 2 O 3 /air-gap structures on (001) β-Ga 2 O 3 using HCl gas etching
- ジャーナル論文
- 著者
-
Takayoshi Oshima (author) (この著者で検索)
;
Yuichi Oshima (author) (この著者で検索)
- キーワード
- β-Ga2O3, cantilever, air bridge, MEMS
- 刊行年月日
- 2025-12-31
- 更新時刻
- 2025-09-04 12:30:25 +0900