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ジャーナル論文(13)
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キーワード
Ga2O3 (14)
(-102) (1)
Delafossite (1)
HCl (1)
HVPE (1)
MEMS (1)
Power devices (1)
Schottky (1)
Superlattice (1)
TMAH (1)
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キーワード: Ga2O3
全ての絞り込みを解除
14 件のレコードが見つかりました。
High-performance β-Ga2O3 Schottky barrier diodes and metal-semiconductor field-effect transistors on a high doping level epitaxial layer
ジャーナル論文
著者
Qihao Zhang
(author) (
この著者で検索
)
Qihao Zhang
;
Jiangwei Liu
(author) (
この著者で検索
)
https://orcid.org/0000-0003-2580-7401
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Jiangwei Liu
;
Chunming Tu
(author) (
この著者で検索
)
Chunming Tu
;
Dongyuan Zhai
(author) (
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)
Dongyuan Zhai
;
Min He
(author) (
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)
Min He
;
Jiwu Lu
(author) (
この著者で検索
)
Jiwu Lu
キーワード
Ga2O3
,
Transistor
刊行年月日
2023-01-03
更新時刻
2025-01-04 16:30:50 +0900
Using selective-area growth and selective-area etching on (−102) β-Ga2O3 substrates to fabricate plasma-damage-free vertical fins and trenches
ジャーナル論文
著者
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science Research Center for Electronic and Optical Materials
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Yuichi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8293-4891
National Institute for Materials Science Research Center for Electronic and Optical Materials
NIMS Researchers Directory SAMURAI
Yuichi Oshima
キーワード
Ga2O3
,
(-102)
,
selective area growth
,
selective area etching
刊行年月日
2024-01-22
更新時刻
2025-01-25 12:30:12 +0900
Fabrication of coherent γ-Al2O3/Ga2O3 superlattices on MgAl2O4 substrates
ジャーナル論文
著者
Yuji Kato
(author) (
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)
Yuji Kato
;
Masataka Imura
(author) (
この著者で検索
)
https://orcid.org/0000-0002-4236-9549
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Masataka Imura
;
Yoshiko Nakayama
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7607-6779
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yoshiko Nakayama
;
Masaki Takeguchi
(author) (
この著者で検索
)
https://orcid.org/0000-0002-0282-6020
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Masaki Takeguchi
;
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
キーワード
Ga2O3
,
Superlattice
刊行年月日
2019-06-01
更新時刻
2024-01-05 22:11:34 +0900
Plasma-free dry etching of (001) β-Ga2O3 substrates by HCl gas
ジャーナル論文
著者
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Yuichi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8293-4891
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yuichi Oshima
キーワード
Ga2O3
,
etching
,
HCl
刊行年月日
2023-04-17
更新時刻
2024-05-29 08:30:12 +0900
キーワード
Ga2O3
(14)
(-102)
(1)
Delafossite
(1)
HCl
(1)
HVPE
(1)
MEMS
(1)
Power devices
(1)
Schottky
(1)
Superlattice
(1)
TMAH
(1)
Thin film
(1)
Transistor
(1)
anisotropic etching
(1)
b-Ga2O3
(1)
dislocation
(1)
dopant
(1)
epitaxy
(1)
etching
(1)
fcc
(1)
forming gas
(1)
plasma-free process
(1)
power device
(1)
selective area etching
(1)
selective area growth
(1)
wet etching
(1)
κ-Ga2O3
(1)
RDEメタデータ定義
RDE送り状
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