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論文・データセット
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ジャーナル論文(20)
キーワード
Ga2O3 (20)
HVPE (5)
TMAH (4)
ELO (2)
HCl gas etching (2)
Superlattice (2)
dislocation (2)
wet etching (2)
(-102) (1)
(011) (1)
(more)
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Creative Commons BY Attribution 4.0 International (11)
In Copyright (5)
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Creative Commons BY-NC Attribution-NonCommercial 4.0 International (1)
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application/pdf (16)
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キーワード: Ga2O3
全ての絞り込みを解除
20 件のレコードが見つかりました。
全ての絞り込みを解除
Halide vapor phase epitaxy of a thick
c
-plane α-Ga2O3 film on a high-quality α-Cr2O3/sapphire template
ジャーナル論文
著者
Yuichi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Shiyu Xiao
(author) (
この著者で検索
)
https://orcid.org/0009-0007-0382-0396
(unauthenticated)
Shiyu Xiao
;
Kazuto Murakami
(author) (
この著者で検索
)
Kazuto Murakami
;
Katsuhiro Imai
(author) (
この著者で検索
)
Katsuhiro Imai
;
Takahiro Tomita
(author) (
この著者で検索
)
Takahiro Tomita
キーワード
Ga2O3
,
HVPE
,
Cr2O3
刊行年月日
2026-02-21
更新時刻
2026-02-18 16:30:15 +0900
α-Al2O3/Ga2O3 superlattices coherently grown on r-plane sapphire
ジャーナル論文
著者
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Yuji Kato
(author) (
この著者で検索
)
Yuji Kato
;
Masataka Imura
(author) (
この著者で検索
)
https://orcid.org/0000-0002-4236-9549
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Masataka Imura
;
Yoshiko Nakayama
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7607-6779
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yoshiko Nakayama
;
Masaki Takeguchi
(author) (
この著者で検索
)
https://orcid.org/0000-0002-0282-6020
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Masaki Takeguchi
キーワード
Ga2O3
,
Superlattice
刊行年月日
2018-06-01
更新時刻
2024-01-05 22:12:13 +0900
Lattice-matched (Al
x
Sc
y
Ga1−
x
−
y
)2O3/
β
-Ga2O3 heterostructures with widely tunable bandgap
ジャーナル論文
著者
Kazuki Koreishi
(author) (
この著者で検索
)
https://orcid.org/0009-0000-1580-8262
(unauthenticated)
Kazuki Koreishi
;
Kodai Niitsu
(author) (
この著者で検索
)
https://orcid.org/0000-0002-0430-8868
NIMS Researchers Directory SAMURAI
Kodai Niitsu
;
Takuto Soma
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8685-9606
(unauthenticated)
Takuto Soma
;
Kohei Yoshimatsu
(author) (
この著者で検索
)
https://orcid.org/0000-0001-9288-068X
(unauthenticated)
Kohei Yoshimatsu
;
Akira Ohtomo
(author) (
この著者で検索
)
https://orcid.org/0000-0003-0300-4712
(unauthenticated)
Akira Ohtomo
キーワード
Ga2O3
,
Wide bandgap
,
Bandgap engineering
刊行年月日
2026-07-06
更新時刻
2026-08-06 09:39:59 +0900
Self-aligned patterning on β-Ga2O3 substrates via backside-exposure photolithography
ジャーナル論文
著者
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
キーワード
Ga2O3
,
lithography
刊行年月日
2023-01-01
更新時刻
2024-01-24 11:20:15 +0900
Rapid homoepitaxial growth of (011) β-Ga
2
O
3
by HCl-based halide vapor phase epitaxy
ジャーナル論文
著者
Yuichi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
キーワード
Ga2O3
,
HVPE
刊行年月日
2025-12-31
更新時刻
2025-11-28 08:30:04 +0900
Fabrication of air bridges on (100) β-Ga2O3 using crystallographic HCl gas etching
ジャーナル論文
著者
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Yuichi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
キーワード
Ga2O3
,
HCl gas etching
,
air bridge
刊行年月日
2025-05-01
更新時刻
2025-05-07 12:30:22 +0900
(110)- and (−134)-faceted surface morphology of halide vapor phase epitaxy-grown
β-
Ga
2
O
3
homoepitaxial layers on (011) substrates
ジャーナル論文
著者
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Yuichi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
キーワード
Ga2O3
,
(011)
,
AFM
,
TEM
刊行年月日
2026-07-15
更新時刻
2026-07-09 10:29:39 +0900
HCl-based halide vapor phase epitaxy and selective-area HCl gas etching of (−112) β-Ga
2
O
3
ジャーナル論文
著者
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Yuichi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
キーワード
Ga2O3
,
(−112)
,
HVPE
,
HCl gas etching
刊行年月日
2026-12-31
更新時刻
2026-07-16 10:12:49 +0900
Tetramethylammonium hydroxide (TMAH) treatment of dry-etched trenches on (010) β-Ga2O3 to enhance trench profiles
ジャーナル論文
著者
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
キーワード
Ga2O3
,
TMAH
刊行年月日
2026-02-01
更新時刻
2026-02-25 12:30:03 +0900
Epitaxial relationship of NiO on (-102) β-Ga2O3
ジャーナル論文
著者
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science Research Center for Electronic and Optical Materials
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Shinji Nakagomi
(author) (
この著者で検索
)
Ishinomaki Senshu University Faculty of Science and Engineering
Shinji Nakagomi
キーワード
Ga2O3
,
NiO
,
epitaxial relationship
刊行年月日
2023-12-01
更新時刻
2024-11-23 16:30:35 +0900
キーワード
Ga2O3
(20)
HVPE
(5)
TMAH
(4)
ELO
(2)
HCl gas etching
(2)
Superlattice
(2)
dislocation
(2)
wet etching
(2)
(-102)
(1)
(011)
(1)
(−112)
(1)
AFM
(1)
Bandgap engineering
(1)
Cr2O3
(1)
Delafossite
(1)
MEMS
(1)
NiO
(1)
Power devices
(1)
Schottky
(1)
TEM
(1)
Thin film
(1)
Wet etching
(1)
Wide bandgap
(1)
air bridge
(1)
anisotropic etching
(1)
epitaxial relationship
(1)
forming gas
(1)
lithography
(1)
plasma-free process
(1)
selective area etching
(1)
selective area growth
(1)
RDEメタデータ定義
RDE送り状
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絞り込み
コレクション
資源タイプ
ジャーナル論文(20)
キーワード
Ga2O3 (20)
HVPE (5)
TMAH (4)
ELO (2)
HCl gas etching (2)
Superlattice (2)
dislocation (2)
wet etching (2)
(-102) (1)
(011) (1)
(more)
ライセンス
Creative Commons BY Attribution 4.0 International (11)
In Copyright (5)
Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International (3)
Creative Commons BY-NC Attribution-NonCommercial 4.0 International (1)
ファイル種別
application/pdf (16)
application/vnd.openxmlformats-officedocument.wordprocessingml.document (4)
application/zip (1)