Disclosing the annihilation effect of ion-implantation induced defects in single-crystal diamond by resonant MEMS
- ジャーナル論文
- 著者
-
;Guo Chen (author) (この著者で検索);Zilong Zhang (author) (この著者で検索);Yasuo Koide (author) (この著者で検索);Satoshi Koizumi (author) (この著者で検索);Zhaohui Huang (author) (この著者で検索)Meiyong Liao (author) (この著者で検索)National Institute for Materials Science
- キーワード
- Diamond, MEMS
- 刊行年月日
- 2023-07-26
- 更新時刻
- 2025-07-26 08:30:34 +0900
Fabrication of β-Ga 2 O 3 /air-gap structures on (001) β-Ga 2 O 3 using HCl gas etching
- ジャーナル論文
- 著者
-
Takayoshi Oshima (author) (この著者で検索)
;
Yuichi Oshima (author) (この著者で検索)
- キーワード
- β-Ga2O3, cantilever, air bridge, MEMS
- 刊行年月日
- 2025-12-31
- 更新時刻
- 2025-09-04 12:30:25 +0900
Surface desorption properties of hydrogen-terminated diamond detected by micromechanical resonator
- ジャーナル論文
- 著者
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Keyun Gu (author) (この著者で検索)
https://orcid.org/0000-0002-7505-7744
(unauthenticated)
;
Zilong Zhang (author) (この著者で検索)
;
Jian Huang (author) (この著者で検索)
https://orcid.org/0000-0002-1268-8899
(unauthenticated)
;
Yasuo Koide (author) (この著者で検索)
;
Satoshi Koizumi (author) (この著者で検索)
;
Meiyong Liao (author) (この著者で検索)
- キーワード
- Diamond, surface conductivity, MEMS
- 刊行年月日
- 2025-06-02
- 更新時刻
- 2025-07-14 12:30:29 +0900
Developing nickel-catalyzed graphene/diamond heterostructures for MEMS applications
- プレゼンテーション
- 著者
-
Guo Chen (author) (この著者で検索)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Wen Zhao (author) (この著者で検索)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Zhaozong Zhang (author) (この著者で検索)
https://orcid.org/0009-0003-8745-4469
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Satoshi KOIZUMI (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Meiyong Liao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
- キーワード
- Diamond, MEMS
- 刊行年月日
- 更新時刻
- 2025-11-06 12:30:32 +0900