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Collection
Resource type
Journal article(9)
Keyword
Auger Depth Profiling Analysis (9)
GaAs/AlAs Superlattice (2)
Inclined Holder (2)
Sample Cooling Method (2)
Si/Ge multiple delta-doped layers (2)
Ultra Low Angle Incidence Ion Beam (2)
Argon Ion Spot Beam (1)
Depth Resolution (1)
FeNi/CoFeB/FeNi Thin Film (1)
HfO2/Si (1)
(more)
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In Copyright (1)
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application/pdf (9)
Keyword: Auger Depth Profiling Analysis
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9 records found.
Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam
Journal article
Creator
OGIWARA, Toshiya
(author) (
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)
https://orcid.org/0000-0002-7376-6571
NIMS Researchers Directory SAMURAI
OGIWARA, Toshiya
;
HARADA, Tomoko
(author) (
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)
HARADA, Tomoko
;
TANUMA, Shigeo
(author) (
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)
https://orcid.org/0000-0003-2628-9941
NIMS Researchers Directory SAMURAI
TANUMA, Shigeo
Keyword
Auger Depth Profiling Analysis
,
InP/GaInAsP Multilayer Specimen
,
Argon Ion Spot Beam
Date published
2011-06-10
Updated at
2022-10-03 02:04:45 +0900
Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy. Effects of Zalar Rotation and Liquid Nitrogen Cold Stage
Journal article
Creator
Ogiwara, Toshiya
(author) (
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)
https://orcid.org/0000-0002-7376-6571
NIMS Researchers Directory SAMURAI
Ogiwara, Toshiya
;
Tanuma, Shigeo
(author) (
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)
https://orcid.org/0000-0003-2628-9941
NIMS Researchers Directory SAMURAI
Tanuma, Shigeo
;
Nagasawa, Yuji
(author) (
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)
Nagasawa, Yuji
;
Ikeo, Nobuyuki
(author) (
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)
Ikeo, Nobuyuki
Keyword
Auger Depth Profiling Analysis
,
InP/GaInAsP Multilayers
,
Zalar Rotation Method
,
Sample Cooling Method
Date published
2011-06-10
Updated at
2022-10-03 01:53:08 +0900
Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder
Journal article
Creator
Ogiwara, Toshiya
(author) (
Search by this author
)
https://orcid.org/0000-0002-7376-6571
NIMS Researchers Directory SAMURAI
Ogiwara, Toshiya
;
Nagatomi, Takaharu
(author) (
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)
https://orcid.org/0000-0002-3629-638X
(unauthenticated)
Nagatomi, Takaharu
;
Kim, Kyung Joong
(author) (
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)
https://orcid.org/0000-0001-5559-9784
(unauthenticated)
Kim, Kyung Joong
;
Tanuma, Shigeo
(author) (
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)
https://orcid.org/0000-0003-2628-9941
NIMS Researchers Directory SAMURAI
Tanuma, Shigeo
Keyword
Auger Depth Profiling Analysis
,
Si/Ge multiple delta-doped layers
,
GaAs/AlAs Superlattice
,
Inclined Holder
Date published
2011-10-24
Updated at
2024-01-05 22:14:10 +0900
English Translation of J. Surf. Anal. 24, 192-205(2018), Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam
Journal article
Creator
Ogiwara, Toshiya
(author) (
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)
https://orcid.org/0000-0002-7376-6571
NIMS Researchers Directory SAMURAI
Ogiwara, Toshiya
;
Nagata, Takahiro
(author) (
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)
https://orcid.org/0000-0002-8591-2943
NIMS Researchers Directory SAMURAI
Nagata, Takahiro
;
Yoshikawa, Hideki
(author) (
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)
https://orcid.org/0000-0002-7389-8865
NIMS Researchers Directory SAMURAI
Yoshikawa, Hideki
Keyword
Auger Depth Profiling Analysis
,
HfO2/Si
,
Ultra Low Angle Incidence Ion Beam
Date published
2020-06-04
Updated at
2022-10-03 01:48:14 +0900
InP/GaInAs多層膜のAES深さ方向分析のラウンドロビン試験報告(I)
Journal article
Creator
Ogiwara, Toshiya
(author) (
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)
https://orcid.org/0000-0002-7376-6571
NIMS Researchers Directory SAMURAI
Ogiwara, Toshiya
;
Tanuma, Shigeo
(author) (
Search by this author
)
https://orcid.org/0000-0003-2628-9941
NIMS Researchers Directory SAMURAI
Tanuma, Shigeo
Keyword
Auger Depth Profiling Analysis
,
InP/GaInAs Specimen
,
Round Robin Test
Date published
1995-11-16
Updated at
2022-10-03 01:55:14 +0900
試料冷却法を併用したAES深さ方向分析によるSiO2/Si熱酸化膜の分析
Journal article
Creator
Ogiwara, Toshiya
(author) (
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)
https://orcid.org/0000-0002-7376-6571
NIMS Researchers Directory SAMURAI
Ogiwara, Toshiya
;
Tanuma, Shigeo
(author) (
Search by this author
)
https://orcid.org/0000-0003-2628-9941
NIMS Researchers Directory SAMURAI
Tanuma, Shigeo
Keyword
Auger Depth Profiling Analysis
,
SiO2/Si
,
Sample Cooling Method
Date published
1996-02-08
Updated at
2022-10-03 01:39:59 +0900
High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Holder based on Geometric Characteristics of Auger Electron Spectroscopy Apparatus Equipped with Concentric Hemispherical Analyzer
Journal article
Creator
Tanuma, Shigeo
(author) (
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)
https://orcid.org/0000-0003-2628-9941
NIMS Researchers Directory SAMURAI
Tanuma, Shigeo
;
Ogiwara, Toshiya
(author) (
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)
https://orcid.org/0000-0002-7376-6571
NIMS Researchers Directory SAMURAI
Ogiwara, Toshiya
;
Kim, Kyung Joong
(author) (
Search by this author
)
https://orcid.org/0000-0001-5559-9784
(unauthenticated)
Kim, Kyung Joong
;
Nagatomi, Takaharu
(author) (
Search by this author
)
https://orcid.org/0000-0002-3629-638X
(unauthenticated)
Nagatomi, Takaharu
Keyword
Auger Depth Profiling Analysis
,
Si/Ge multiple delta-doped layers
,
GaAs/AlAs Superlattice
,
Inclined Holder
Date published
2016-04-03
Updated at
2024-01-05 22:13:47 +0900
Auger Depth Profiling Analysis of FeNi/CoFeB/FeNi Specimen Using an Ultra Low Angle Incidence Ion Beam
Journal article
Creator
Ogiwara, Toshiya
(author) (
Search by this author
)
https://orcid.org/0000-0002-7376-6571
NIMS Researchers Directory SAMURAI
Ogiwara, Toshiya
;
Yanagiuchi, Katsuaki
(author) (
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)
https://orcid.org/0000-0002-3882-8052
(unauthenticated)
Yanagiuchi, Katsuaki
;
Yoshikawa, Hideki
(author) (
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)
https://orcid.org/0000-0002-7389-8865
NIMS Researchers Directory SAMURAI
Yoshikawa, Hideki
Keyword
Ultra Low Angle Incidence Ion Beam
,
FeNi/CoFeB/FeNi Thin Film
,
Auger Depth Profiling Analysis
Date published
2019-03-31
Updated at
2024-01-05 22:13:23 +0900
InP/GaInAsP多層膜におけるAES深さ分解能の温度依存性
Journal article
Creator
Ogiwara, Toshiya
(author) (
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)
https://orcid.org/0000-0002-7376-6571
NIMS Researchers Directory SAMURAI
Ogiwara, Toshiya
;
Tanuma, Shigeo
(author) (
Search by this author
)
https://orcid.org/0000-0003-2628-9941
NIMS Researchers Directory SAMURAI
Tanuma, Shigeo
Keyword
Auger Depth Profiling Analysis
,
Depth Resolution
,
Sample Temperature
,
InP/GaInAsP多層膜
Date published
1995-05-17
Updated at
2022-10-03 01:44:22 +0900
Keyword
Auger Depth Profiling Analysis
(9)
GaAs/AlAs Superlattice
(2)
Inclined Holder
(2)
Sample Cooling Method
(2)
Si/Ge multiple delta-doped layers
(2)
Ultra Low Angle Incidence Ion Beam
(2)
Argon Ion Spot Beam
(1)
Depth Resolution
(1)
FeNi/CoFeB/FeNi Thin Film
(1)
HfO2/Si
(1)
InP/GaInAs Specimen
(1)
InP/GaInAsP Multilayer Specimen
(1)
InP/GaInAsP Multilayers
(1)
InP/GaInAsP多層膜
(1)
Round Robin Test
(1)
Sample Temperature
(1)
SiO2/Si
(1)
Zalar Rotation Method
(1)
RDE metadata def
RDE invoice schema
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