- Auger depth profiling analysis (11)
- HfO2/Si (10)
- Auger Depth Profiling Analysis (9)
- Ultra low angle incidence ion beam (8)
- Ultra Low Angle Incidence Ion Beam (3)
- GaAs/AlAs Superlattice (2)
- InP/GaInAsP multilayer specimens (2)
- Inclined Holder (2)
- Sample Cooling Method (2)
- Si/Ge multiple delta-doped layers (2)
22 records found. Displaying records 1 to 10.
Raw data files for Fig. 12 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
- Dataset
- Creator
-
OGIWARA, Toshiya (author) (Search by this author)National Institute for Materials Science
;
NAGATA, Takahiro (author) (Search by this author)National Institute for Materials Science
;
YOSHIKAWA, Hideki (author) (Search by this author)National Institute for Materials Science
- Keyword
- Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
- Date published
- 2019-03-07
- Updated at
- 2024-01-05 22:13:20 +0900
Raw data files for Fig. 11 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
- Dataset
- Creator
-
OGIWARA, Toshiya (author) (Search by this author)National Institute for Materials Science
;
NAGATA, Takahiro (author) (Search by this author)National Institute for Materials Science
;
YOSHIKAWA, Hideki (author) (Search by this author)National Institute for Materials Science
- Keyword
- Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
- Date published
- 2019-03-07
- Updated at
- 2024-04-07 22:57:41 +0900
Raw data files for Fig. 10 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
- Dataset
- Creator
-
OGIWARA, Toshiya (author) (Search by this author)National Institute for Materials Science
;
NAGATA, Takahiro (author) (Search by this author)National Institute for Materials Science
;
YOSHIKAWA, Hideki (author) (Search by this author)National Institute for Materials Science
- Keyword
- Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
- Date published
- 2019-03-07
- Updated at
- 2024-01-05 22:12:41 +0900
Raw data files for Fig. 9 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
- Dataset
- Creator
-
OGIWARA, Toshiya (author) (Search by this author)National Institute for Materials Science
;
NAGATA, Takahiro (author) (Search by this author)National Institute for Materials Science
;
YOSHIKAWA, Hideki (author) (Search by this author)National Institute for Materials Science
- Keyword
- Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
- Date published
- 2019-03-07
- Updated at
- 2024-10-08 12:20:27 +0900
Raw data files for Fig. 5 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
- Dataset
- Creator
-
OGIWARA, Toshiya (author) (Search by this author)National Institute for Materials Science
;
NAGATA, Takahiro (author) (Search by this author)National Institute for Materials Science
;
YOSHIKAWA, Hideki (author) (Search by this author)National Institute for Materials Science
- Keyword
- Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
- Date published
- 2019-03-07
- Updated at
- 2024-03-30 18:50:38 +0900
Raw data files for Fig. 6 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
- Dataset
- Creator
-
OGIWARA, Toshiya (author) (Search by this author)National Institute for Materials Science
;
NAGATA, Takahiro (author) (Search by this author)National Institute for Materials Science
;
YOSHIKAWA, Hideki (author) (Search by this author)National Institute for Materials Science
- Keyword
- Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
- Date published
- 2019-03-07
- Updated at
- 2024-03-30 18:50:25 +0900
Raw data files for Fig. 7 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
- Dataset
- Creator
-
OGIWARA, Toshiya (author) (Search by this author)National Institute for Materials Science
;
NAGATA, Takahiro (author) (Search by this author)National Institute for Materials Science
;
YOSHIKAWA, Hideki (author) (Search by this author)National Institute for Materials Science
- Keyword
- Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
- Date published
- 2019-03-07
- Updated at
- 2024-01-05 22:12:25 +0900
Raw data files for Fig. 8 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
- Dataset
- Creator
-
OGIWARA, Toshiya (author) (Search by this author)National Institute for Materials Science
;
NAGATA, Takahiro (author) (Search by this author)National Institute for Materials Science
;
YOSHIKAWA, Hideki (author) (Search by this author)National Institute for Materials Science
- Keyword
- Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
- Date published
- 2019-03-07
- Updated at
- 2024-01-05 22:11:29 +0900
Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering
- Journal article
- Creator
-
OGIWARA, Toshiya (author) (Search by this author)
;
TANUMA, Shigeo (author) (Search by this author)
- Keyword
- depth resolution function, InP/GaInAsP multilayer specimens, Auger depth profiling analysis, surface roughness, atomic force microscope
- Date published
- 2011-06-10
- Updated at
- 2022-10-03 01:24:02 +0900
Auger Depth Profiling Analyses of InP/GaInAsP Multilayers
- Journal article
- Creator
-
OGIWARA, Toshiya (author) (Search by this author)
;
TANUMA, Shigeo (author) (Search by this author)
- Keyword
- argon ion sputtering, InP/GaInAsP multilayer specimens, Auger depth profiling analysis
- Date published
- 2011-06-10
- Updated at
- 2022-10-03 02:01:29 +0900