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Article(7)
Keyword
β-Ga2O3 (7)
HVPE (1)
Harmonic generation in wide bandgap semiconductors (1)
MBE (1)
MEMS (1)
air bridge (1)
atom probe (1)
cantilever (1)
composition (1)
etching (1)
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Creative Commons BY Attribution 4.0 International (2)
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application/pdf (7)
Keyword: β-Ga2O3
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7 records found.
Fabrication of β-Ga
2
O
3
/air-gap structures on (001) β-Ga
2
O
3
using HCl gas etching
Article
Creator
Takayoshi Oshima
;
Yuichi Oshima
Keyword
β-Ga2O3
,
cantilever
,
air bridge
,
MEMS
Date published
2025-12-31
Updated at
2025-09-04 12:30:25 +0900
Anisotropic below bandgap harmonic generation in
β
-gallium oxide
Article
Creator
Mukhtar Hussain
; André Mesquita Antunes ;
Gonçalo Vaz
;
Joana Alves
;
Hugo Pires
;
Tayyab Imran
; Marco Peres ; Katharina Lorenz ; Encarnación Víllora ;
Kiyoshi Shimamura
; Saibabu Madas ; Mousumi Upadhyay Kahaly ;
Subhendu Kahaly
;
Gonçalo Figueira
; Marta Fajardo ; Gareth Williams
Keyword
β-Ga2O3
,
Harmonic generation in wide bandgap semiconductors
Date published
2024-12-16
Updated at
2024-12-20 16:30:44 +0900
Growth and etching characteristics of (001) β- Ga2O3 by plasma-assisted molecular beam epitaxy
Article
Creator
Yuichi Oshima
;
Elaheh Ahmadi
; Stephen Kaun ; Feng Wu ; James S Speck
Keyword
β-Ga2O3
,
MBE
Date published
2018-01-01
Updated at
2024-01-22 09:42:02 +0900
Effect of temperature and HCl partial pressure on the selective area gas etching of (001) β-Ga2O3
Article
Creator
Yuichi Oshima
;
Takayoshi Oshima
Keyword
β-Ga2O3
,
etching
Date published
2023-08-01
Updated at
2024-08-21 08:30:30 +0900
Homoepitaxial growth of (-102) β-Ga2O3 by halide vapor phase epitaxy
Article
Creator
Yuichi Oshima
;
Takayoshi Oshima
Keyword
β-Ga2O3
,
HVPE
Date published
2023-10-01
Updated at
2024-08-31 08:31:17 +0900
Composition determination of beta-(AlxGa1-x)2O3 layers coherently grown on (010) beta-Ga2O3 substrates by high-resolution x-ray diffraction
Article
Creator
Yuichi Oshima
; Elaheh Ahmadi ; Stefan C. Badescu ; Feng Wu ; James S. Speck
Keyword
β-Ga2O3
,
composition
,
atom probe
Date published
2016-06-01
Updated at
2024-01-24 09:26:50 +0900
Quasi-heteroepitaxial growth of β-Ga2O3 on off-angled sapphire (0001) substrates by Halide Vapor Phase Epitaxy
Article
Creator
Yuichi Oshima
;
Encarnaciόn G. Vίllora
;
Kiyoshi Shimamura
Keyword
β-Ga2O3
,
heteroepitaxy
Date published
2014-10-28
Updated at
2024-01-22 09:35:42 +0900
Keyword
β-Ga2O3
(7)
HVPE
(1)
Harmonic generation in wide bandgap semiconductors
(1)
MBE
(1)
MEMS
(1)
air bridge
(1)
atom probe
(1)
cantilever
(1)
composition
(1)
etching
(1)
heteroepitaxy
(1)
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