Resource type: journal_article Keyword: Auger Depth Profiling Analysis
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9 records found.

表面科学_13_1992_595.pdf
Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam
Article
Creator
OGIWARA, Toshiya SAMURAI ORCID ; HARADA, Tomoko ; TANUMA, Shigeo SAMURAI ORCID
Keyword
Auger Depth Profiling Analysis, InP/GaInAsP Multilayer Specimen, Argon Ion Spot Beam
Date published
2011-06-10
Updated at
2022-10-03 02:04:45 +0900
表面科学_13_1992_472.pdf
Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy. Effects of Zalar Rotation and Liquid Nitrogen Cold Stage
Article
Creator
Ogiwara, Toshiya SAMURAI ORCID ; Tanuma, Shigeo SAMURAI ORCID ; Nagasawa, Yuji ; Ikeo, Nobuyuki
Keyword
Auger Depth Profiling Analysis, InP/GaInAsP Multilayers, Zalar Rotation Method, Sample Cooling Method
Date published
2011-06-10
Updated at
2022-10-03 01:53:08 +0900
表面科学_32_2011_664.pdf
Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder
Article
Creator
Ogiwara, Toshiya SAMURAI ORCID ; Nagatomi, Takaharu ORCID ; Kim, Kyung Joong ORCID ; Tanuma, Shigeo SAMURAI ORCID
Keyword
Auger Depth Profiling Analysis, Si/Ge multiple delta-doped layers, GaAs/AlAs Superlattice, Inclined Holder
Date published
2011-10-24
Updated at
2024-01-05 22:14:10 +0900
Vol.25_No.3_2019.pdf
English Translation of J. Surf. Anal. 24, 192-205(2018), Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam
Article
Creator
Ogiwara, Toshiya SAMURAI ORCID ; Nagata, Takahiro SAMURAI ORCID ; Yoshikawa, Hideki SAMURAI ORCID
Keyword
Auger Depth Profiling Analysis, HfO2/Si, Ultra Low Angle Incidence Ion Beam
Date published
2020-06-04
Updated at
2022-10-03 01:48:14 +0900
Vol.1_No.3_374-387.pdf
InP/GaInAs多層膜のAES深さ方向分析のラウンドロビン試験報告（I）
Article
Creator
Ogiwara, Toshiya SAMURAI ORCID ; Tanuma, Shigeo SAMURAI ORCID
Keyword
Auger Depth Profiling Analysis, InP/GaInAs Specimen, Round Robin Test
Date published
1995-11-16
Updated at
2022-10-03 01:55:14 +0900
Vol.2_No.1_59-64.pdf
試料冷却法を併用したAES深さ方向分析によるSiO2/Si熱酸化膜の分析
Article
Creator
Ogiwara, Toshiya SAMURAI ORCID ; Tanuma, Shigeo SAMURAI ORCID
Keyword
Auger Depth Profiling Analysis, SiO2/Si, Sample Cooling Method
Date published
1996-02-08
Updated at
2022-10-03 01:39:59 +0900
JSA_Vol18_No3_174.pdf
High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Holder based on Geometric Characteristics of Auger Electron Spectroscopy Apparatus Equipped with Concentric Hemispherical Analyzer
Article
Creator
Tanuma, Shigeo SAMURAI ORCID ; Ogiwara, Toshiya SAMURAI ORCID ; Kim, Kyung Joong ORCID ; Nagatomi, Takaharu ORCID
Keyword
Auger Depth Profiling Analysis, Si/Ge multiple delta-doped layers, GaAs/AlAs Superlattice, Inclined Holder
Date published
2016-04-03
Updated at
2024-01-05 22:13:47 +0900
JSA_Vol25_14-20.pdf
Auger Depth Profiling Analysis of FeNi/CoFeB/FeNi Specimen Using an Ultra Low Angle Incidence Ion Beam
Article
Creator
Ogiwara, Toshiya SAMURAI ORCID ; Yanagiuchi, Katsuaki ORCID ; Yoshikawa, Hideki SAMURAI ORCID
Keyword
Auger Depth Profiling Analysis, FeNi/CoFeB/FeNi Thin Film , Ultra Low Angle Incidence Ion Beam
Date published
2019-03-31
Updated at
2024-01-05 22:13:23 +0900
JSA_Vol.1_No.2_227-233.pdf
InP/GaInAsP多層膜におけるAES深さ分解能の温度依存性
Article
Creator
Ogiwara, Toshiya SAMURAI ORCID ; Tanuma, Shigeo SAMURAI ORCID
Keyword
Auger Depth Profiling Analysis, Depth Resolution, Sample Temperature, InP/GaInAsP多層膜
Date published
1995-05-17
Updated at
2022-10-03 01:44:22 +0900