7 records found.
Fabrication of β -Ga 2 O 3 /air-gap structures on (010) β -Ga 2 O 3 by wet etching in tetramethylammonium hydroxide (TMAH)
- Journal article
- Creator
-
Takayoshi Oshima (author) (Search by this author)
- Keyword
- Ga2O3, TMAH, wet etching, MEMS
- Date published
- 2025-11-01
- Updated at
- 2025-11-27 08:30:13 +0900
On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film
- Journal article
- Creator
-
Zilong Zhang (author) (Search by this author)National Institute for Materials Science
;
;Wen Zhao (author) (Search by this author);Guo Chen (author) (Search by this author)National Institute for Materials Science;Masaya Toda (author) (Search by this author)Satoshi Koizumi (author) (Search by this author)National Institute for Materials Science
;
Yasuo Koide (author) (Search by this author)National Institute for Materials Science
;
Meiyong Liao (author) (Search by this author)National Institute for Materials Science
- Keyword
- Diamond, MEMS, Magnetic sensors
- Date published
- 2023-03-27
- Updated at
- 2024-07-04 16:30:34 +0900
Disclosing the annihilation effect of ion-implantation induced defects in single-crystal diamond by resonant MEMS
- Journal article
- Creator
-
;Guo Chen (author) (Search by this author);Zilong Zhang (author) (Search by this author);Yasuo Koide (author) (Search by this author);Satoshi Koizumi (author) (Search by this author);Zhaohui Huang (author) (Search by this author)Meiyong Liao (author) (Search by this author)National Institute for Materials Science
- Keyword
- Diamond, MEMS
- Date published
- 2023-07-26
- Updated at
- 2025-07-26 08:30:34 +0900
High-order resonance enhancing the mass sensitivity of diamond cantilevers
- Journal article
- Creator
-
Wen Zhao (author) (Search by this author)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
;
Guo Chen (author) (Search by this author)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
;
Keyun Gu (author) (Search by this author)
https://orcid.org/0000-0002-7505-7744
(unauthenticated)
;
;Masaya Toda (author) (Search by this author)Yasuo Koide (author) (Search by this author)
;
Meiyong Liao (author) (Search by this author)
- Keyword
- Diamond, MEMS
- Date published
- 2025-04-01
- Updated at
- 2025-07-12 08:30:35 +0900
Frequency stability improvement of single-crystal diamond cantilever utilizing higher-order-mode excitation
- Journal article
- Creator
-
;Wen Zhao (author) (Search by this author);Guo Chen (author) (Search by this author)Zhaozong Zhang (author) (Search by this author)
https://orcid.org/0009-0003-8745-4469
(unauthenticated)
;
Satoshi Koizumi (author) (Search by this author)
;
Meiyong Liao (author) (Search by this author)
- Keyword
- Diamond, MEMS
- Date published
- 2025-06-26
- Updated at
- 2025-07-11 16:30:21 +0900
20.1 A 3.5×3.5mm2 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack
- Journal article
- Creator
-
;Kotaro Naruse (author) (Search by this author);Naru Kato (author) (Search by this author);Takuma Matsumori (author) (Search by this author);Jun Shlomi (author) (Search by this author);Yoshihiro Midoh (author) (Search by this author);Tetsuya Hirose (author) (Search by this author)Gaku Imamura (author) (Search by this author)National Institute for Materials Science
;
Genki Yoshikawa (author) (Search by this author)National Institute for Materials Science
;
;Constantine Sideris (author) (Search by this author)Noriyuki Miura (author) (Search by this author)
- Keyword
- gas sensor, CMOS, MEMS
- Date published
- 2025-02-16
- Updated at
- 2025-12-25 16:21:05 +0900
Diamond MEMS Magnetic Force Sensor Toward Femtonewton at Room Temperature
- Conference paper
- Creator
-
;Zilong Zhang (author) (Search by this author);Zhijian Zhao (author) (Search by this author)Meiyong Liao (author) (Search by this author)
;
;Takahito Ono (author) (Search by this author)Masaya Toda (author) (Search by this author)
- Keyword
- Diamond, MEMS, magnetic sensors
- Date published
- 2025-01-19
- Updated at
- 2025-11-13 16:30:04 +0900