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Article and Dataset
Collection
MDR lattice thermal conductivity calculation database(2)
MDR phonon calculation database(2)
Resource type
Journal article(22)
Dataset(4)
Keyword
Ga2O3 (26)
HVPE (4)
TMAH (4)
HCl gas etching (3)
Lattice thermal conductivity (2)
Phonon (2)
Superlattice (2)
dislocation (2)
wet etching (2)
(-102) (1)
(more)
License
Creative Commons BY Attribution 4.0 International (17)
Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International (5)
In Copyright (4)
File type
application/pdf (17)
application/vnd.openxmlformats-officedocument.wordprocessingml.document (5)
application/x-xz (4)
image/png (4)
text/x-log (2)
application/zip (1)
Keyword: Ga2O3
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26 records found. Displaying records 1 to 10.
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Ab-initio phonon calculation for Ga2O3 / C2/m (12) / materials id 886
Dataset
Collection
MDR phonon calculation database
Creator
Atsushi Togo
(author) (
Search by this author
)
https://orcid.org/0000-0001-8393-9766
MaDIS, National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Atsushi Togo
Keyword
Phonon
,
Ga2O3
,
C2/m (12)
Date published
Updated at
2023-05-14 18:54:18 +0900
Ab-initio phonon calculation for Ga2O3 / R-3c (167) / materials id 1243
Dataset
Collection
MDR phonon calculation database
Creator
Atsushi Togo
(author) (
Search by this author
)
https://orcid.org/0000-0001-8393-9766
MaDIS, National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Atsushi Togo
Keyword
Phonon
,
Ga2O3
,
R-3c (167)
Date published
Updated at
2023-05-14 18:35:31 +0900
Step-and-terrace surface formation on (001)
β
-Ga
2
O
3
by wet etching using 2.38 wt% tetramethylammonium hydroxide (TMAH) lithographic developer
Journal article
Creator
Takayoshi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
Keyword
Ga2O3
,
TMAH
,
Wet etching
Date published
2025-08-01
Updated at
2025-08-18 16:30:36 +0900
Plasma-free anisotropic selective-area etching of β-Ga
2
O
3
using forming gas under atmospheric pressure
Journal article
Creator
Takayoshi Oshima
(author) (
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)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Rie Togashi
(author) (
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)
https://orcid.org/0000-0002-9467-0755
(unauthenticated)
Rie Togashi
;
Yuichi Oshima
(author) (
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)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
Keyword
Ga2O3
,
forming gas
,
anisotropic etching
,
plasma-free process
Date published
2024-12-31
Updated at
2024-07-31 12:30:20 +0900
First-principles lattice thermal conductivity calculation for Ga2O3 / C2/m (12) / materials id 886
Dataset
Collection
MDR lattice thermal conductivity calculation database
Creator
Atsushi Togo
(author) (
Search by this author
)
https://orcid.org/0000-0001-8393-9766
Center for Basic Research on Materials, National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Atsushi Togo
Keyword
Lattice thermal conductivity
,
Ga2O3
Date published
Updated at
2026-01-24 14:36:41 +0900
First-principles lattice thermal conductivity calculation for Ga2O3 / R-3c (167) / materials id 1243
Dataset
Collection
MDR lattice thermal conductivity calculation database
Creator
Atsushi Togo
(author) (
Search by this author
)
https://orcid.org/0000-0001-8393-9766
Center for Basic Research on Materials, National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Atsushi Togo
Keyword
Lattice thermal conductivity
,
Ga2O3
Date published
Updated at
2026-01-24 12:32:36 +0900
HCl-based halide vapor phase epitaxy and selective-area HCl gas etching of (−112) β-Ga
2
O
3
Journal article
Creator
Takayoshi Oshima
(author) (
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)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Yuichi Oshima
(author) (
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)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
Keyword
Ga2O3
,
(−112)
,
HVPE
,
HCl gas etching
Date published
2026-12-31
Updated at
2026-07-16 10:12:49 +0900
Lattice-matched (Al
x
Sc
y
Ga1−
x
−
y
)2O3/
β
-Ga2O3 heterostructures with widely tunable bandgap
Journal article
Creator
Kazuki Koreishi
(author) (
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)
https://orcid.org/0009-0000-1580-8262
(unauthenticated)
Kazuki Koreishi
;
Kodai Niitsu
(author) (
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)
https://orcid.org/0000-0002-0430-8868
NIMS Researchers Directory SAMURAI
Kodai Niitsu
;
Takuto Soma
(author) (
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)
https://orcid.org/0000-0001-8685-9606
(unauthenticated)
Takuto Soma
;
Kohei Yoshimatsu
(author) (
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)
https://orcid.org/0000-0001-9288-068X
(unauthenticated)
Kohei Yoshimatsu
;
Akira Ohtomo
(author) (
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)
https://orcid.org/0000-0003-0300-4712
(unauthenticated)
Akira Ohtomo
Keyword
Ga2O3
,
Wide bandgap
,
Bandgap engineering
Date published
2026-07-06
Updated at
2026-08-06 09:39:59 +0900
Self-aligned patterning on β-Ga2O3 substrates via backside-exposure photolithography
Journal article
Creator
Takayoshi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
Keyword
Ga2O3
,
lithography
Date published
2023-01-01
Updated at
2024-01-24 11:20:15 +0900
Epitaxial relationship of NiO on (-102) β-Ga2O3
Journal article
Creator
Takayoshi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8550-9735
Research Center for Electronic and Optical Materials, National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Shinji Nakagomi
(author) (
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)
Faculty of Science and Engineering, Ishinomaki Senshu University
Shinji Nakagomi
Keyword
Ga2O3
,
NiO
,
epitaxial relationship
Date published
2023-12-01
Updated at
2024-11-23 16:30:35 +0900
Keyword
Ga2O3
(26)
HVPE
(4)
TMAH
(4)
HCl gas etching
(3)
Lattice thermal conductivity
(2)
Phonon
(2)
Superlattice
(2)
dislocation
(2)
wet etching
(2)
(-102)
(1)
(−112)
(1)
Al2O3
(1)
Bandgap engineering
(1)
C2/m (12)
(1)
Cr2O3
(1)
ELO
(1)
MEMS
(1)
NiO
(1)
R-3c (167)
(1)
Transistor
(1)
Wet etching
(1)
Wide bandgap
(1)
air bridge
(1)
anisotropic etching
(1)
atomic layer deposition
(1)
dummy-SiO2
(1)
epitaxial relationship
(1)
fcc
(1)
forming gas
(1)
lithography
(1)
plasma-free process
(1)
positive bias stress
(1)
selective area etching
(1)
selective area growth
(1)
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Filter
Collection
MDR lattice thermal conductivity calculation database(2)
MDR phonon calculation database(2)
Resource type
Journal article(22)
Dataset(4)
Keyword
Ga2O3 (26)
HVPE (4)
TMAH (4)
HCl gas etching (3)
Lattice thermal conductivity (2)
Phonon (2)
Superlattice (2)
dislocation (2)
wet etching (2)
(-102) (1)
(more)
License
Creative Commons BY Attribution 4.0 International (17)
Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International (5)
In Copyright (4)
File type
application/pdf (17)
application/vnd.openxmlformats-officedocument.wordprocessingml.document (5)
application/x-xz (4)
image/png (4)
text/x-log (2)
application/zip (1)