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Keyword: MEMS

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24 records found.

Oshima_2025_Appl._Phys._Express_18_116501-1.pdf

Fabrication of β -Ga ₂ O ₃ /air-gap structures on (010) β -Ga ₂ O ₃ by wet etching in tetramethylammonium hydroxide (TMAH)

Journal article
Creator: Takayoshi Oshima (author) (Search by this author)

https://orcid.org/0000-0001-8550-9735

NIMS Researchers Directory SAMURAI
Keyword: Ga2O3, TMAH, wet etching, MEMS
Date published: 2025-11-01
Updated at: 2025-11-27 08:30:13 +0900

High Quality Factor Single-Crystal Diamond NEMS Cantilevers Fabricated by A Smart-Cut Method

Conference poster
Creator: Guo Chen (author) (Search by this author)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Wen Zhao (author) (Search by this author)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Keyun Gu (author) (Search by this author)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Satoshi Koizumi (author) (Search by this author)

https://orcid.org/0000-0003-4961-5658

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI

;

Yasuo Koide (author) (Search by this author)

https://orcid.org/0000-0001-8321-9822

Research Center for Electronic and Optical Materials/Functional Materials Field/Next-generation Semiconductor Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (Search by this author)

https://orcid.org/0000-0003-1361-4266

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI
Keyword: Diamond, MEMS
Date published
Updated at: 2025-05-22 08:30:08 +0900

Developing nickel-catalyzed graphene/diamond heterostructures for MEMS applications

Conference presentation
Creator: Guo Chen (author) (Search by this author)

https://orcid.org/0009-0004-9263-5616 (unauthenticated)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Wen Zhao (author) (Search by this author)

https://orcid.org/0000-0001-8159-8195 (unauthenticated)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Zhaozong Zhang (author) (Search by this author)

https://orcid.org/0009-0003-8745-4469 (unauthenticated)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Satoshi KOIZUMI (author) (Search by this author)

https://orcid.org/0000-0003-4961-5658

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (Search by this author)

https://orcid.org/0000-0003-1361-4266

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI
Keyword: Diamond, MEMS
Date published
Updated at: 2025-11-06 12:30:32 +0900

Diamond MEMS Magnetic Force Sensor Toward Femtonewton at Room Temperature

Conference paper
Creator: Zilong Zhang (author) (Search by this author)

;

Zhijian Zhao (author) (Search by this author)

;

Meiyong Liao (author) (Search by this author)

https://orcid.org/0000-0003-1361-4266

NIMS Researchers Directory SAMURAI

;

Takahito Ono (author) (Search by this author)

;

Masaya Toda (author) (Search by this author)
Keyword: Diamond, MEMS, magnetic sensors
Date published: 2025-01-19
Updated at: 2025-11-13 16:30:04 +0900

Fabrication of -Ga2O3 air-gap structures on 001 -Ga2O3 using HCl gas etching.pdf

Fabrication of β-Ga ₂ O ₃ /air-gap structures on (001) β-Ga ₂ O ₃ using HCl gas etching

Journal article
Creator: Takayoshi Oshima (author) (Search by this author)

https://orcid.org/0000-0001-8550-9735

NIMS Researchers Directory SAMURAI

;

Yuichi Oshima (author) (Search by this author)

https://orcid.org/0000-0001-8293-4891

NIMS Researchers Directory SAMURAI
Keyword: β-Ga2O3, cantilever, air bridge, MEMS
Date published: 2025-12-31
Updated at: 2025-09-04 12:30:25 +0900

Characterization of Young’s Modulus Anisotropy of Single-Crystal Diamond

Conference presentation
Creator: Zhaozong Zhang (author) (Search by this author)

https://orcid.org/0009-0003-8745-4469 (unauthenticated)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Wen Zhao (author) (Search by this author)

https://orcid.org/0000-0001-8159-8195 (unauthenticated)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Guo Chen (author) (Search by this author)

https://orcid.org/0009-0004-9263-5616 (unauthenticated)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Satoshi Koizumi (author) (Search by this author)

https://orcid.org/0000-0003-4961-5658

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (Search by this author)

https://orcid.org/0000-0003-1361-4266

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI
Keyword: Diamond, MEMS
Date published
Updated at: 2025-11-06 12:30:27 +0900

NDNC2025_abstract_template -WEN_Finalized　Zhao_Liao.docx

Ultra-High-Resolution Thermometer Based on Diamond MEMS

Conference presentation
Creator: Wen Zhao (author) (Search by this author)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Tokuyuki Teraji (author) (Search by this author)

https://orcid.org/0000-0002-7731-0547

Research Center for Electronic and Optical Materials/Optical Materials Field/Semiconductor Defect Design Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI

;

Satoshi Koizumi (author) (Search by this author)

https://orcid.org/0000-0003-4961-5658

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI

;

Yasuo Koide (author) (Search by this author)

https://orcid.org/0000-0001-8321-9822

Research Center for Electronic and Optical Materials, National Institute for Materials Science

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (Search by this author)

https://orcid.org/0000-0003-1361-4266

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI
Keyword: Diamond, MEMS
Date published
Updated at: 2025-05-22 08:30:40 +0900

単結晶ダイヤモンドにおけるヤング率の定量評価と異方性解析

Conference presentation
Creator: 張兆宗 (author) (Search by this author)

https://orcid.org/0009-0003-8745-4469 (unauthenticated)

電子・光機能材料研究センター/機能材料分野/超ワイドギャップ半導体グループ, 物質・材料研究機構

;

ザオウェン (author) (Search by this author)

https://orcid.org/0000-0001-8159-8195 (unauthenticated)

電子・光機能材料研究センター/機能材料分野/超ワイドギャップ半導体グループ, 物質・材料研究機構

;

陳果 (author) (Search by this author)

https://orcid.org/0009-0004-9263-5616 (unauthenticated)

電子・光機能材料研究センター/機能材料分野/超ワイドギャップ半導体グループ, 物質・材料研究機構

;

小泉聡 (author) (Search by this author)

https://orcid.org/0000-0003-4961-5658

電子・光機能材料研究センター/機能材料分野/超ワイドギャップ半導体グループ, 物質・材料研究機構

 NIMS Researchers Directory SAMURAI

;

廖梅勇 (author) (Search by this author)

https://orcid.org/0000-0003-1361-4266

電子・光機能材料研究センター/機能材料分野/超ワイドギャップ半導体グループ, 物質・材料研究機構

 NIMS Researchers Directory SAMURAI
Keyword: Diamond, MEMS
Date published
Updated at: 2025-11-06 12:30:37 +0900

Abstract Oxygen-termination effect R.doc

Effect of Oxygen Terminal Surface Adsorption Layer on Energy Dissipation in Single-Crystal Diamond MEMS

Conference presentation
Creator: Keyun Gu (author) (Search by this author)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Zilong Zhang (author) (Search by this author)

https://orcid.org/0000-0002-9759-9253

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Wen Zhao (author) (Search by this author)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Guo Chen (author) (Search by this author)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Jian Huang (author) (Search by this author)

China University of Geosciences

;

Satoshi Koizumi (author) (Search by this author)

https://orcid.org/0000-0003-4961-5658

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI

;

Yasuo Koide (author) (Search by this author)

https://orcid.org/0000-0001-8321-9822

Research Center for Electronic and Optical Materials, National Institute for Materials Science

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (Search by this author)

https://orcid.org/0000-0003-1361-4266

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI
Keyword: ダイヤモンド, MEMS
Date published
Updated at: 2025-04-12 08:30:28 +0900

On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film

Journal article
Creator: Zilong Zhang (author) (Search by this author)

https://orcid.org/0000-0002-9759-9253

National Institute for Materials Science

;

Wen Zhao (author) (Search by this author)

;

Guo Chen (author) (Search by this author)

National Institute for Materials Science

;

Masaya Toda (author) (Search by this author)

;

Satoshi Koizumi (author) (Search by this author)

https://orcid.org/0000-0003-4961-5658

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

;

Yasuo Koide (author) (Search by this author)

https://orcid.org/0000-0001-8321-9822

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (Search by this author)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science

NIMS Researchers Directory SAMURAI
Keyword: Diamond, MEMS, Magnetic sensors
Date published: 2023-03-27
Updated at: 2024-07-04 16:30:34 +0900

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