ライセンス: In Copyright キーワード: MEMS

13 件のレコードが見つかりました。

perspective-20241226.pdf
A perspective on diamond MEMS magnetic sensors
ジャーナル論文
著者
ORCID ;
Keyun Gu (author) (この著者で検索)
;
Masaya Toda (author) (この著者で検索)
ORCID ; ORCID SAMURAI
キーワード
Diamond, MEMS, magnetic sensors
刊行年月日
2025-03-01
更新時刻
2025-05-19 16:30:19 +0900

2025 03 15 APL mauscript of H-1 desorption.docx
Surface desorption properties of hydrogen-terminated diamond detected by micromechanical resonator
ジャーナル論文
著者
Keyun Gu (author) (この著者で検索)
ORCID ; ORCID ;
Jian Huang (author) (この著者で検索)
ORCID ; ORCID SAMURAI ; ORCID SAMURAI ; ORCID SAMURAI
キーワード
Diamond, surface conductivity, MEMS
刊行年月日
2025-06-02
更新時刻
2025-07-14 12:30:29 +0900

AFM-resonator_sensor-20230307 .pdf
On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film
ジャーナル論文
著者
Zilong Zhang (author) (この著者で検索)
National Institute for Materials Science
ORCID ;
Wen Zhao (author) (この著者で検索)
;
Guo Chen (author) (この著者で検索)
National Institute for Materials Science
;
Masaya Toda (author) (この著者で検索)
;
Satoshi Koizumi (author) (この著者で検索)
ORCID SAMURAI ;
Yasuo Koide (author) (この著者で検索)
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
ORCID SAMURAI
キーワード
Diamond, MEMS, Magnetic sensors
刊行年月日
2023-03-27
更新時刻
2024-07-04 16:30:34 +0900

5 Uploaded Manuscript__WEN-DRM.docx
Frequency stability improvement of single-crystal diamond cantilever utilizing higher-order-mode excitation
ジャーナル論文
著者
Wen Zhao (author) (この著者で検索)
;
Guo Chen (author) (この著者で検索)
;
Zhaozong Zhang (author) (この著者で検索)
ORCID ; ORCID SAMURAI ; ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
2025-06-26
更新時刻
2025-07-11 16:30:21 +0900

Zhang_MEMS2025_202415-submit.docx
Diamond MEMS Magnetic Force Sensor Toward Femtonewton at Room Temperature
プロシーディングス論文
著者
Zilong Zhang (author) (この著者で検索)
;
Zhijian Zhao (author) (この著者で検索)
; ORCID SAMURAI ;
Takahito Ono (author) (この著者で検索)
;
Masaya Toda (author) (この著者で検索)
キーワード
Diamond, MEMS, magnetic sensors
刊行年月日
2025-01-19
更新時刻
2025-11-13 16:30:04 +0900

2024 NEMS ZHANG-20240220.doc
Diamond NEMS Resonators for Real-Time Dual Sensing of Magnetic Fields and Temperatures up to 500°C
プロシーディングス論文
著者
Zilong Zhang (author) (この著者で検索)
;
Keyun Gu (author) (この著者で検索)
;
Guo Chen (author) (この著者で検索)
; ORCID SAMURAI ; ORCID SAMURAI ; ORCID SAMURAI
キーワード
Diamond, MEMS, magnetic sensors
刊行年月日
2024-05-02
更新時刻
2025-01-25 08:30:41 +0900

edtm2025-paper-template-word_Liao 10.26.pdf
Single-Crystal Diamond MEMS for Extreme Sensors
プロシーディングス論文
著者
ORCID SAMURAI
キーワード
Diamond, MEMS, sensors
刊行年月日
2025-03-09
更新時刻
2025-07-29 16:30:25 +0900

manuscript.pdf
20.1 A 3.5×3.5mm2 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack
ジャーナル論文
著者
Kotaro Naruse (author) (この著者で検索)
;
Naru Kato (author) (この著者で検索)
;
Takuma Matsumori (author) (この著者で検索)
;
Jun Shlomi (author) (この著者で検索)
;
Yoshihiro Midoh (author) (この著者で検索)
;
Tetsuya Hirose (author) (この著者で検索)
;
Gaku Imamura (author) (この著者で検索)
ORCID SAMURAI ;
Genki Yoshikawa (author) (この著者で検索)
ORCID SAMURAI ;
Constantine Sideris (author) (この著者で検索)
;
Noriyuki Miura (author) (この著者で検索)
キーワード
gas sensor, CMOS, MEMS
刊行年月日
2025-02-16
更新時刻
2025-12-25 16:21:05 +0900

Revised chapter-20230509 -new.docx
Single-Crystal Diamond MEMS Magnetic Sensor
書籍
著者
Zilong Zhang (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
Diamond, MEMS, magnetic sensors
刊行年月日
2024-05-22
更新時刻
2024-10-21 12:30:45 +0900

3-Abstract-WEN Liao.docx
High-quality Factor Diamond MEMS Resonators for Ultra-precise Thermometry
プレゼンテーション
著者
Wen Zhao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Guo Chen (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Zhaozong Zhang (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Satoshi KOIZUMI (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
Diamond,, MEMS
刊行年月日
更新時刻
2026-01-09 11:00:08 +0900