File type: application/vnd.openxmlformats-officedocument.wordprocessingml.document Keyword: MEMS

14 records found.

Zhang_MEMS2025_202415-submit.docx
Diamond MEMS Magnetic Force Sensor Toward Femtonewton at Room Temperature
Conference paper
Creator
Zilong Zhang (author) (Search by this author)
;
Zhijian Zhao (author) (Search by this author)
; ORCID SAMURAI ;
Takahito Ono (author) (Search by this author)
;
Masaya Toda (author) (Search by this author)
Keyword
Diamond, MEMS, magnetic sensors
Date published
2025-01-19
Updated at
2025-11-13 16:30:04 +0900

4.29 Characterization of diamond MEMS cantilevers mitigating substrate interference effects _Liao.docx
Optical properties of single-crystal diamond MEMS: mitigating substrate interference
Journal article
Creator
Keyun Gu (author) (Search by this author)
ORCID ;
Zilong Zhang (author) (Search by this author)
;
Zhaozong Zhang (author) (Search by this author)
ORCID ;
Jian Huang (author) (Search by this author)
; ORCID SAMURAI ; ORCID SAMURAI ; ORCID SAMURAI
Keyword
Diamond, MEMS
Date published
2025-12-31
Updated at
2025-10-28 12:30:30 +0900

30-Manuscript-WEN_2025-Liao 20250114.docx
Ultra‐High Sensitivity, Wide‐Range Thermometry Based on High‐Quality Microscale Diamond Resonators
Journal article
Creator
Wen Zhao (author) (Search by this author)
ORCID ;
Guo Chen (author) (Search by this author)
ORCID ; ORCID SAMURAI ;
Yasuo Koide (author) (Search by this author)
;
Masaya Toda (author) (Search by this author)
; ORCID SAMURAI
Keyword
Diamond, MEMS
Date published
2025-07-28
Updated at
2025-10-28 12:30:23 +0900

3-Abstract-WEN Liao.docx
High-quality Factor Diamond MEMS Resonators for Ultra-precise Thermometry
Conference presentation
Creator
Wen Zhao (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID ;
Guo Chen (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID ;
Zhaozong Zhang (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID ;
Satoshi KOIZUMI (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID SAMURAI ;
Meiyong Liao (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID SAMURAI
Keyword
Diamond,, MEMS
Date published
Updated at
2026-01-09 11:00:08 +0900

NIMS張兆宗abstract Liao.docx
単結晶ダイヤモンドにおけるヤング率の定量評価と異方性解析
Conference presentation
Creator
張 兆宗 (author) (Search by this author)
電子・光機能材料研究センター/機能材料分野/超ワイドギャップ半導体グループ, 物質・材料研究機構
ORCID ;
ザオ ウェン (author) (Search by this author)
電子・光機能材料研究センター/機能材料分野/超ワイドギャップ半導体グループ, 物質・材料研究機構
ORCID ;
陳 果 (author) (Search by this author)
電子・光機能材料研究センター/機能材料分野/超ワイドギャップ半導体グループ, 物質・材料研究機構
ORCID ;
小泉 聡 (author) (Search by this author)
電子・光機能材料研究センター/機能材料分野/超ワイドギャップ半導体グループ, 物質・材料研究機構
ORCID SAMURAI ;
廖 梅勇 (author) (Search by this author)
電子・光機能材料研究センター/機能材料分野/超ワイドギャップ半導体グループ, 物質・材料研究機構
ORCID SAMURAI
Keyword
Diamond, MEMS
Date published
Updated at
2025-11-06 12:30:37 +0900

abstract Zhang_Liao.docx
Characterization of Young’s Modulus Anisotropy of Single-Crystal Diamond
Conference presentation
Creator
Zhaozong Zhang (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID ;
Wen Zhao (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID ;
Guo Chen (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID ;
Satoshi Koizumi (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID SAMURAI ;
Meiyong Liao (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID SAMURAI
Keyword
Diamond, MEMS
Date published
Updated at
2025-11-06 12:30:27 +0900

5 Uploaded Manuscript__WEN-DRM.docx
Frequency stability improvement of single-crystal diamond cantilever utilizing higher-order-mode excitation
Journal article
Creator
Wen Zhao (author) (Search by this author)
;
Guo Chen (author) (Search by this author)
;
Zhaozong Zhang (author) (Search by this author)
ORCID ; ORCID SAMURAI ; ORCID SAMURAI
Keyword
Diamond, MEMS
Date published
2025-06-26
Updated at
2025-07-11 16:30:21 +0900

NDNC2025_abstract_template -WEN_Finalized Zhao_Liao.docx
Ultra-High-Resolution Thermometer Based on Diamond MEMS
Conference presentation
Creator
Wen Zhao (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Tokuyuki Teraji (author) (Search by this author)
Research Center for Electronic and Optical Materials/Optical Materials Field/Semiconductor Defect Design Group, National Institute for Materials Science
ORCID SAMURAI ;
Satoshi Koizumi (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID SAMURAI ;
Yasuo Koide (author) (Search by this author)
Research Center for Electronic and Optical Materials, National Institute for Materials Science
ORCID SAMURAI ;
Meiyong Liao (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID SAMURAI
Keyword
Diamond, MEMS
Date published
Updated at
2025-05-22 08:30:40 +0900

NDNC2025_abstract_MEMS Gu.docx
Revealing the Surface Adsorbates of Diamond Using MEMS Resonators
Conference poster
Creator
Keyun Gu (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Zilong Zhang (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID ;
Wen Zhao (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Guo Chen (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Yasuo Koide (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Next-generation Semiconductor Group, National Institute for Materials Science
ORCID SAMURAI ;
Satoshi Koizumi (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID SAMURAI ;
Meiyong Liao (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID SAMURAI
Keyword
Diamond, MEMS
Date published
Updated at
2025-05-22 08:30:23 +0900