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HCl-gas etching behavior of 001 -Ga2O3 under oxygen supply.pdf
HCl-gas etching of (001) β-Ga2O3 under oxygen supply
ジャーナル論文
著者
Yuichi Oshima (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
Takayoshi Oshima (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
Ga2O3, etching, plasma-free
刊行年月日
2025-12-31
更新時刻
2025-09-04 12:30:19 +0900
2310.03143v1.pdf
1D Crystallographic Etching of Few‐Layer WS2
ジャーナル論文
著者
ORCID ;
Yung‐Chang Lin (author) (この著者で検索)
ORCID ;
Yiling Chiew (author) (この著者で検索)
;
Yunyun Dai (author) (この著者で検索)
;
Zixuan Ning (author) (この著者で検索)
;
Yaming Zhang (author) (この著者で検索)
;
Hideaki Nakajima (author) (この著者で検索)
;
Hong En Lim (author) (この著者で検索)
;
Jing Wu (author) (この著者で検索)
;
Yasuhisa Neitoh (author) (この著者で検索)
;
Toshiya Okazaki (author) (この著者で検索)
;
Yang Sun (author) (この著者で検索)
;
Zhipei Sun (author) (この著者で検索)
;
Kazu Suenaga (author) (この著者で検索)
;
Yoshiki Sakuma (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Kazuhito Tsukagoshi (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Takaaki Taniguchi (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
1D nanotrenches, etching, photoluminescence, second harmonic generation, transition metal dichalcogenides
刊行年月日
2024-10-03
更新時刻
2024-11-20 16:30:24 +0900
paper.pdf
Formation of GaN mesas with reverse-tapered edge structures on a lattice-matched AlInN layer for a positive beveled edge termination
ジャーナル論文
著者
Takayoshi Oshima (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
Masataka Imura (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Next-generation Semiconductor Group
ORCID SAMURAI ;
Yuichi Oshima (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
GaN, AlInN, etching, positive bevel edge termination
刊行年月日
2024-08-01
更新時刻
2024-08-02 12:30:52 +0900
162102_1_5.0138736.pdf
Plasma-free dry etching of (001) β-Ga2O3 substrates by HCl gas
ジャーナル論文
著者
Takayoshi Oshima (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Yuichi Oshima (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
Ga2O3, etching, HCl
刊行年月日
2023-04-17
更新時刻
2024-05-29 08:30:12 +0900
Clean manuscript(211010).pdf
Visualization of threading dislocations in an α-Ga2O3 epilayer by HCl gas etching
ジャーナル論文
著者
Yuichi Oshima (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Shingo Yagyu (author) (この著者で検索)
;
Takashi Shinohe (author) (この著者で検索)
キーワード
α-Ga2O3, dislocation, etching
刊行年月日
2021-10-19
更新時刻
2024-01-22 09:38:31 +0900
BGO(001)etch230802_clean.pdf
Effect of temperature and HCl partial pressure on the selective area gas etching of (001) β-Ga2O3
ジャーナル論文
著者
Yuichi Oshima (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Takayoshi Oshima (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
β-Ga2O3, etching
刊行年月日
2023-08-01
更新時刻
2024-08-21 08:30:30 +0900