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Tanuma, Shigeo
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Journal of Surface Analysis
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表面電子分光法における信号の減衰はいかに記述されるか? II. 誘電関数とIMFP
InP/GaInAs多層膜のAES深さ方向分析のラウンドロビン試験報告(I)
High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Hol...
Arイオンスパッタリングされた各種化合物半導体表面のSEM観察
InP/GaInAsP多層膜におけるAES深さ分解能の温度依存性
電子線マイクロアナライザーによるMg-Ge合金の定量 -Mg Kαに対するGeの質量吸収係数の検討- and Electron microprobe analysis of...
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6
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Auger Depth Profiling Analysis
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Depth Resolution
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GaAs/AlAs Superlattice
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InP/GaInAs Specimen
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InP/GaInAsP多層膜
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Japanese
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Surface Analysis Society of Japan
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In Copyright
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Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International
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GaAs
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GaAs/AlAs Superlattice
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GaP
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GaSb
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InAs
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Date accepted
2004
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2017
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Author
Tanuma, Shigeo
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Ogiwara, Toshiya
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Imai, Motoharu
1
Isoda, Yukihiro
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Kim, Kyung Joong
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Journal of Surface Analysis
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