キーワード: Si/Ge multiple delta-doped layers
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表面科学_32_2011_664.pdf
Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder
論文
著者
Ogiwara, Toshiya SAMURAI ORCID ; Nagatomi, Takaharu ORCID ; Kim, Kyung Joong ORCID ; Tanuma, Shigeo SAMURAI ORCID
キーワード
Auger Depth Profiling Analysis, Si/Ge multiple delta-doped layers, GaAs/AlAs Superlattice, Inclined Holder
刊行年月日
2011-10-24
更新時刻
2024-01-05 22:14:10 +0900
JSA_Vol18_No3_174.pdf
High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Holder based on Geometric Characteristics of Auger Electron Spectroscopy Apparatus Equipped with Concentric Hemispherical Analyzer
論文
著者
Tanuma, Shigeo SAMURAI ORCID ; Ogiwara, Toshiya SAMURAI ORCID ; Kim, Kyung Joong ORCID ; Nagatomi, Takaharu ORCID
キーワード
Auger Depth Profiling Analysis, Si/Ge multiple delta-doped layers, GaAs/AlAs Superlattice, Inclined Holder
刊行年月日
2016-04-03
更新時刻
2024-01-05 22:13:47 +0900