3 件のレコードが見つかりました。
Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering
- 論文
- 著者
-
OGIWARA, Toshiya
;
TANUMA, Shigeo
- キーワード
- depth resolution function, InP/GaInAsP multilayer specimens, Auger depth profiling analysis, surface roughness, atomic force microscope
- 刊行年月日
- 2011-06-10
- 更新時刻
- 2022-10-03 01:24:02 +0900
Auger Depth Profiling Analyses of InP/GaInAsP Multilayers
- 論文
- 著者
-
OGIWARA, Toshiya
;
TANUMA, Shigeo
- キーワード
- argon ion sputtering, InP/GaInAsP multilayer specimens, Auger depth profiling analysis
- 刊行年月日
- 2011-06-10
- 更新時刻
- 2022-10-03 02:01:29 +0900
Auger Depth Profile Analysis of GaAs/AIAs Thin Film by Synthesized Spectrum Method Using Non-Negative Least Square Curve Fitting
- 論文
- 著者
-
OGIWARA, Toshiya
;
TANUMA, Shigeo
- キーワード
- peak separation, non-negative least-square curve fit, Auger depth profiling analysis, GaAs/AlAs multilayer
- 刊行年月日
- 2011-06-10
- 更新時刻
- 2022-10-03 01:51:43 +0900