Disclosing the annihilation effect of ion-implantation induced defects in single-crystal diamond by resonant MEMS
- ジャーナル論文
- 著者
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;Guo Chen (author) (この著者で検索);Zilong Zhang (author) (この著者で検索);Yasuo Koide (author) (この著者で検索);Satoshi Koizumi (author) (この著者で検索);Zhaohui Huang (author) (この著者で検索)Meiyong Liao (author) (この著者で検索)National Institute for Materials Science
- キーワード
- Diamond, MEMS
- 刊行年月日
- 2023-07-26
- 更新時刻
- 2025-07-26 08:30:34 +0900
20.1 A 3.5×3.5mm2 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack
- ジャーナル論文
- 著者
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;Kotaro Naruse (author) (この著者で検索);Naru Kato (author) (この著者で検索);Takuma Matsumori (author) (この著者で検索);Jun Shlomi (author) (この著者で検索);Yoshihiro Midoh (author) (この著者で検索);Tetsuya Hirose (author) (この著者で検索)Gaku Imamura (author) (この著者で検索)National Institute for Materials Science
;
Genki Yoshikawa (author) (この著者で検索)National Institute for Materials Science
;
;Constantine Sideris (author) (この著者で検索)Noriyuki Miura (author) (この著者で検索)
- キーワード
- gas sensor, CMOS, MEMS
- 刊行年月日
- 2025-02-16
- 更新時刻
- 2025-12-25 16:21:05 +0900
Surface desorption properties of hydrogen-terminated diamond detected by micromechanical resonator
- ジャーナル論文
- 著者
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Keyun Gu (author) (この著者で検索)
https://orcid.org/0000-0002-7505-7744
(unauthenticated)
;
Zilong Zhang (author) (この著者で検索)
;
Jian Huang (author) (この著者で検索)
https://orcid.org/0000-0002-1268-8899
(unauthenticated)
;
Yasuo Koide (author) (この著者で検索)
;
Satoshi Koizumi (author) (この著者で検索)
;
Meiyong Liao (author) (この著者で検索)
- キーワード
- Diamond, surface conductivity, MEMS
- 刊行年月日
- 2025-06-02
- 更新時刻
- 2025-07-14 12:30:29 +0900
Low-Energy Dissipation Diamond MEMS
- ジャーナル論文
- 著者
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;Guo Chen (author) (この著者で検索)Satoshi Koizumi (author) (この著者で検索)National Institute for Materials Science
;
Yasuo Koide (author) (この著者で検索)National Institute for Materials Science
;
Meiyong Liao (author) (この著者で検索)National Institute for Materials Science
- キーワード
- Diamond, MEMS
- 刊行年月日
- 2024-09-27
- 更新時刻
- 2025-07-29 08:30:21 +0900