論文・データセット - MDR: NIMS Materials Data Repository

キーワード: Ga2O3

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7 件のレコードが見つかりました。 1件目から7件目まで表示します。

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paper.pdf

Wet etching of (−102) β-Ga ₂ O ₃ with tetramethylammonium hydroxide (TMAH)

ジャーナル論文
著者: Takayoshi Oshima (author) (この著者で検索)

https://orcid.org/0000-0001-8550-9735

NIMS Researchers Directory SAMURAI
キーワード: Ga2O3, wet etching, TMAH
刊行年月日: 2026-12-31
更新時刻: 2026-06-11 15:11:01 +0900

J_Appl_Phys_139_075302_(2026).pdf

Halide vapor phase epitaxy of a thick c -plane α-Ga2O3 film on a high-quality α-Cr2O3/sapphire template

ジャーナル論文
著者: Yuichi Oshima (author) (この著者で検索)

https://orcid.org/0000-0001-8293-4891

NIMS Researchers Directory SAMURAI

;

Takayoshi Oshima (author) (この著者で検索)

https://orcid.org/0000-0001-8550-9735

NIMS Researchers Directory SAMURAI

;

Shiyu Xiao (author) (この著者で検索)

https://orcid.org/0009-0007-0382-0396 (unauthenticated)

;

Kazuto Murakami (author) (この著者で検索)

;

Katsuhiro Imai (author) (この著者で検索)

;

Takahiro Tomita (author) (この著者で検索)
キーワード: Ga2O3, HVPE, Cr2O3
刊行年月日: 2026-02-21
更新時刻: 2026-02-18 16:30:15 +0900

042110_1_5.0186319.pdf

Using selective-area growth and selective-area etching on (−102) β-Ga2O3 substrates to fabricate plasma-damage-free vertical fins and trenches

ジャーナル論文
著者: Takayoshi Oshima (author) (この著者で検索)

https://orcid.org/0000-0001-8550-9735

National Institute for Materials Science Research Center for Electronic and Optical Materials

NIMS Researchers Directory SAMURAI

;

Yuichi Oshima (author) (この著者で検索)

https://orcid.org/0000-0001-8293-4891

National Institute for Materials Science Research Center for Electronic and Optical Materials

NIMS Researchers Directory SAMURAI
キーワード: Ga2O3, (-102), selective area growth, selective area etching
刊行年月日: 2024-01-22
更新時刻: 2025-01-25 12:30:12 +0900

Oshima - 2026 - Step-and-terrace surface formation on (−112) β-Ga 2 O 3 via thermal annealing-annotated.pdf

Step-and-terrace surface formation on (−112) β-Ga ₂ O ₃ via thermal annealing

ジャーナル論文
著者: Takayoshi Oshima (author) (この著者で検索)

https://orcid.org/0000-0001-8550-9735

NIMS Researchers Directory SAMURAI
キーワード: Ga2O3
刊行年月日: 2026-09-15
更新時刻: 2026-09-14 09:13:42 +0900

Physica Status Solidi b - 2025 - Penman - Comparative Study of the Optical Properties of ‐ ‐ and ‐Ga2O3.pdf

Comparative Study of the Optical Properties of α‐, β‐, and κ‐Ga₂O₃

ジャーナル論文
著者: Lewis T. Penman (author) (この著者で検索)

https://orcid.org/0000-0002-0147-9995 (unauthenticated)

;

Zak M. Johnston (author) (この著者で検索)

;

Paul R. Edwards (author) (この著者で検索)

https://orcid.org/0000-0001-7671-7698 (unauthenticated)

;

Yuichi Oshima (author) (この著者で検索)

https://orcid.org/0000-0001-8293-4891

NIMS Researchers Directory SAMURAI

;

Clifford McAleese (author) (この著者で検索)

;

Piero Mazzolini (author) (この著者で検索)

https://orcid.org/0000-0003-2092-5265 (unauthenticated)

;

Matteo Bosi (author) (この著者で検索)

https://orcid.org/0000-0001-8992-0249 (unauthenticated)

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Luca Seravalli (author) (この著者で検索)

https://orcid.org/0000-0003-2784-1785 (unauthenticated)

;

Roberto Fornari (author) (この著者で検索)

;

Robert W. Martin (author) (この著者で検索)

https://orcid.org/0000-0002-6119-764X (unauthenticated)

;

Fabien C.‐P. Massabuau (author) (この著者で検索)

https://orcid.org/0000-0003-1008-1652 (unauthenticated)
キーワード: Ga2O3
刊行年月日: 2025-02-12
更新時刻: 2025-08-18 16:30:52 +0900

paper_-112.pdf

HCl-based halide vapor phase epitaxy and selective-area HCl gas etching of (−112) β-Ga ₂ O ₃

ジャーナル論文
著者: Takayoshi Oshima (author) (この著者で検索)

https://orcid.org/0000-0001-8550-9735

NIMS Researchers Directory SAMURAI

;

Yuichi Oshima (author) (この著者で検索)

https://orcid.org/0000-0001-8293-4891

NIMS Researchers Directory SAMURAI
キーワード: Ga2O3, (−112), HVPE, HCl gas etching
刊行年月日: 2026-12-31
更新時刻: 2026-07-16 10:12:49 +0900

055207_1_5.0260753-2-8.pdf

Fabrication of air bridges on (100) β-Ga2O3 using crystallographic HCl gas etching

ジャーナル論文
著者: Takayoshi Oshima (author) (この著者で検索)

https://orcid.org/0000-0001-8550-9735

NIMS Researchers Directory SAMURAI

;

Yuichi Oshima (author) (この著者で検索)

https://orcid.org/0000-0001-8293-4891

NIMS Researchers Directory SAMURAI
キーワード: Ga2O3, HCl gas etching, air bridge
刊行年月日: 2025-05-01
更新時刻: 2025-05-07 12:30:22 +0900