Effect of Oxygen Terminal Surface Adsorption Layer on Energy Dissipation in Single-Crystal Diamond MEMS
- プレゼンテーション
- 著者
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;Keyun Gu (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors GroupZilong Zhang (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
;Wen Zhao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group;Guo Chen (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group;Jian Huang (author) (この著者で検索)China University of GeosciencesSatoshi Koizumi (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Yasuo Koide (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials
;
Meiyong Liao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
- キーワード
- ダイヤモンド, MEMS
- 刊行年月日
- 更新時刻
- 2025-04-12 08:30:28 +0900
Ultra-High-Resolution Thermometer Based on Diamond MEMS
- プレゼンテーション
- 著者
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;Wen Zhao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors GroupTokuyuki Teraji (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Optical Materials Field/Semiconductor Defect Design Group
;
Satoshi Koizumi (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Yasuo Koide (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials
;
Meiyong Liao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
- キーワード
- Diamond, MEMS
- 刊行年月日
- 更新時刻
- 2025-05-22 08:30:40 +0900
Characterization of Young’s Modulus Anisotropy of Single-Crystal Diamond
- プレゼンテーション
- 著者
-
Zhaozong Zhang (author) (この著者で検索)
https://orcid.org/0009-0003-8745-4469
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Wen Zhao (author) (この著者で検索)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Guo Chen (author) (この著者で検索)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Satoshi Koizumi (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Meiyong Liao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
- キーワード
- Diamond, MEMS
- 刊行年月日
- 更新時刻
- 2025-11-06 12:30:27 +0900
20.1 A 3.5×3.5mm2 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack
- ジャーナル論文
- 著者
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;Kotaro Naruse (author) (この著者で検索);Naru Kato (author) (この著者で検索);Takuma Matsumori (author) (この著者で検索);Jun Shlomi (author) (この著者で検索);Yoshihiro Midoh (author) (この著者で検索);Tetsuya Hirose (author) (この著者で検索)Gaku Imamura (author) (この著者で検索)National Institute for Materials Science
;
Genki Yoshikawa (author) (この著者で検索)National Institute for Materials Science
;
;Constantine Sideris (author) (この著者で検索)Noriyuki Miura (author) (この著者で検索)
- キーワード
- gas sensor, CMOS, MEMS
- 刊行年月日
- 2025-02-16
- 更新時刻
- 2025-12-25 16:21:05 +0900
Optical properties of single-crystal diamond MEMS: mitigating substrate interference
- ジャーナル論文
- 著者
-
Keyun Gu (author) (この著者で検索)
https://orcid.org/0000-0002-7505-7744
(unauthenticated)
;
;Zilong Zhang (author) (この著者で検索)Zhaozong Zhang (author) (この著者で検索)
https://orcid.org/0009-0003-8745-4469
(unauthenticated)
;
;Jian Huang (author) (この著者で検索)Yasuo Koide (author) (この著者で検索)
;
Satoshi Koizumi (author) (この著者で検索)
;
Meiyong Liao (author) (この著者で検索)
- キーワード
- Diamond, MEMS
- 刊行年月日
- 2025-12-31
- 更新時刻
- 2025-10-28 12:30:30 +0900
High-order resonance enhancing the mass sensitivity of diamond cantilevers
- ジャーナル論文
- 著者
-
Wen Zhao (author) (この著者で検索)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
;
Guo Chen (author) (この著者で検索)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
;
Keyun Gu (author) (この著者で検索)
https://orcid.org/0000-0002-7505-7744
(unauthenticated)
;
;Masaya Toda (author) (この著者で検索)Yasuo Koide (author) (この著者で検索)
;
Meiyong Liao (author) (この著者で検索)
- キーワード
- Diamond, MEMS
- 刊行年月日
- 2025-04-01
- 更新時刻
- 2025-07-12 08:30:35 +0900
On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film
- ジャーナル論文
- 著者
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Zilong Zhang (author) (この著者で検索)National Institute for Materials Science
;
;Wen Zhao (author) (この著者で検索);Guo Chen (author) (この著者で検索)National Institute for Materials Science;Masaya Toda (author) (この著者で検索)Satoshi Koizumi (author) (この著者で検索)National Institute for Materials Science
;
Yasuo Koide (author) (この著者で検索)National Institute for Materials Science
;
Meiyong Liao (author) (この著者で検索)National Institute for Materials Science
- キーワード
- Diamond, MEMS, Magnetic sensors
- 刊行年月日
- 2023-03-27
- 更新時刻
- 2024-07-04 16:30:34 +0900