キーワード: atom probe tomography

5 件のレコードが見つかりました。

Effect of sequential N ion implantation in the formation of a shallow Mg-implanted p-type GaN layer.pdf
Effect of sequential N ion implantation in the formation of a shallow Mg-implanted p-type GaN layer
ジャーナル論文
著者
Jun Uzuhashi (author) (この著者で検索)
National Institute for Materials Science Research Center for Magnetic and Spintronic Materials/Administrative Office
ORCID SAMURAI ;
Jun Chen (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Optical Materials Field/Semiconductor Defect Design Group
ORCID SAMURAI ;
Ryo Tanaka (author) (この著者で検索)
Fuji Electric Corporation
;
Shinya Takashima (author) (この著者で検索)
Fuji Electric Corporation
;
Masaharu Edo (author) (この著者で検索)
Fuji Electric Corporation
;
Tadakatsu Ohkubo (author) (この著者で検索)
National Institute for Materials Science Research Center for Magnetic and Spintronic Materials
ORCID SAMURAI ;
Takashi Sekiguchi (author) (この著者で検索)
University of Tsukuba
キーワード
gallium nitride, atom probe tomography, transmission electron microscopy, cathodoluminescence
刊行年月日
2024-08-07
更新時刻
2024-08-03 08:30:15 +0900

Development of p-type Ion Implantation Technique for Realization of GaN Vertical MOSFETs.pdf
Development of p-type Ion Implantation Technique for Realization of GaN Vertical MOSFETs
プロシーディングス論文
著者
Ryo Tanaka (author) (この著者で検索)
Fuji Electric Co., Ltd.
;
Shinya Takashima (author) (この著者で検索)
Fuji Electric Co., Ltd.
;
Katsunori Ueno (author) (この著者で検索)
Fuji Electric Co., Ltd.
;
Masahiro Horita (author) (この著者で検索)
Nagoya Univ.
;
Jun Suda (author) (この著者で検索)
Nagoya Univ.
;
Jun Uzuhashi (author) (この著者で検索)
ORCID SAMURAI ;
Tadakatsu Ohkubo (author) (この著者で検索)
ORCID SAMURAI ;
Masaharu Edo (author) (この著者で検索)
Fuji Electric Co., Ltd.
キーワード
gallium nitride, atom probe tomography, transmission electron microscopy
刊行年月日
2023-06-08
更新時刻
2024-04-19 12:30:23 +0900

Vacancy-Type Defects and Oxygen Incorporation in NiAl for Advanced Interconnects Probed by Monoenergetic Positron Beams and Atom Probe Tomography.pdf
Vacancy-Type Defects and Oxygen Incorporation in NiAl for Advanced Interconnects Probed by Monoenergetic Positron Beams and Atom Probe Tomography
ジャーナル論文
著者
Akira Uedono (author) (この著者で検索)
ORCID ;
Claudia Fleischmann (author) (この著者で検索)
ORCID ;
Jean-Philippe Soulié (author) (この著者で検索)
;
Mustafa Ayyad (author) (この著者で検索)
;
Jeroen E. Scheerder (author) (この著者で検索)
ORCID ;
Christoph Adelmann (author) (この著者で検索)
; ORCID SAMURAI ; ORCID SAMURAI ;
Koji Michishio (author) (この著者で検索)
ORCID ;
Nagayasu Oshima (author) (この著者で検索)
;
Shoji Ishibashi (author) (この著者で検索)
ORCID
キーワード
atom probe tomography, positron annihilation
刊行年月日
2024-07-10
更新時刻
2025-07-10 08:30:19 +0900

Atomic resolution analysis of extended defects and Mg agglomeration in Mg-ion-implanted GaN and their impacts on acceptor formation.pdf
Atomic resolution analysis of extended defects and Mg agglomeration in Mg-ion-implanted GaN and their impacts on acceptor formation
ジャーナル論文
著者
Emi Kano (author) (この著者で検索)
;
Keita Kataoka (author) (この著者で検索)
;
Jun Uzuhashi (author) (この著者で検索)
ORCID SAMURAI ;
Kenta Chokawa (author) (この著者で検索)
;
Hideki Sakurai (author) (この著者で検索)
;
Akira Uedono (author) (この著者で検索)
;
Tetsuo Narita (author) (この著者で検索)
;
Kacper Sierakowski (author) (この著者で検索)
;
Michal Bockowski (author) (この著者で検索)
;
Ritsuo Otsuki (author) (この著者で検索)
;
Koki Kobayashi (author) (この著者で検索)
;
Yuta Itoh (author) (この著者で検索)
;
Masahiro Nagao (author) (この著者で検索)
;
Tadakatsu Ohkubo (author) (この著者で検索)
ORCID SAMURAI ;
Kazuhiro Hono (author) (この著者で検索)
ORCID SAMURAI ;
Jun Suda (author) (この著者で検索)
;
Tetsu Kachi (author) (この著者で検索)
;
Nobuyuki Ikarashi (author) (この著者で検索)
キーワード
gallium nitride, transmission electron microscopy, atom probe tomography
刊行年月日
2022-08-14
更新時刻
2024-01-05 22:13:58 +0900

Atomic-scale investigation of implanted Mg in GaN through ultra-high-pressure annealing.pdf
Atomic-scale investigation of implanted Mg in GaN through ultra-high-pressure annealing
ジャーナル論文
著者
Jun Uzuhashi (author) (この著者で検索)
ORCID SAMURAI ;
Jun Chen (author) (この著者で検索)
ORCID SAMURAI ;
Ashutosh Kumar (author) (この著者で検索)
National Institute for Materials Science
ORCID ;
Wei Yi (author) (この著者で検索)
National Institute for Materials Science
ORCID ;
Tadakatsu Ohkubo (author) (この著者で検索)
ORCID SAMURAI ;
Ryo Tanaka (author) (この著者で検索)
;
Shinya Takashima (author) (この著者で検索)
;
Masaharu Edo (author) (この著者で検索)
;
Kacper Sierakowski (author) (この著者で検索)
;
Michal Bockowski (author) (この著者で検索)
;
Hideki Sakurai (author) (この著者で検索)
;
Tetsu Kachi (author) (この著者で検索)
;
Takashi Sekiguchi (author) (この著者で検索)
National Institute for Materials Science
ORCID ;
Kazuhiro Hono (author) (この著者で検索)
ORCID SAMURAI
キーワード
gallium nitride, implantation, atom probe tomography, cathodoluminescence, scanning transmission electron microscopy
刊行年月日
2022-05-14
更新時刻
2024-01-05 22:11:22 +0900