6 records found. Displaying records 1 to 6.
Surface Modification for High Reliability and Reversible Hybrid Interconnection
- Conference poster
- Creator
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Akitsu Shigetou (author) (Search by this author)Research Center for Materials Nanoarchitectonics (MANA)/Semiconductor Materials Field/Smart Interface Team, National Institute for Materials Science
- Keyword
- Hybrid bonding, Cu, Solid state debonding
- Date published
- Updated at
- 2026-01-21 09:20:22 +0900
界⾯ナノ構造の制御による接合と分離の両⽴にむけて
- Conference presentation
- Creator
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重藤 暁津 (author) (Search by this author)ナノアーキテクトニクス材料研究センター/半導体材料分野/スマートインターフェイスチーム, 物質・材料研究機構
- Keyword
- 接合, 分離, エレクトロニクス実装
- Date published
- Updated at
- 2026-01-20 17:17:29 +0900
Surface Modification for High-Reliability and Multi-Functional Hybrid Interconnections
- Conference presentation
- Creator
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Akitsu Shigetou (author) (Search by this author)Research Center for Materials Nanoarchitectonics (MANA)/Semiconductor Materials Field/Smart Interface Team, National Institute for Materials Science
- Keyword
- Low temperature bonding, Electronics packaging, VUV, Hybrid bonding
- Date published
- Updated at
- 2026-01-20 17:12:48 +0900
Modified galvanic replacement using ethanol vapor-assisted vacuum ultraviolet (E-VUV) for enhanced Ag deposition
- Journal article
- Creator
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;Shubhayan Mukherjee (author) (Search by this author)Akitsu Shigetou (author) (Search by this author)National Institute for Materials Science
;
;Yu-Hao Chou (author) (Search by this author)Shih-Kang Lin (author) (Search by this author)
- Keyword
- galvanic replacement, vapor-assisted vacuum ultraviolet, Ag deposition
- Date published
- 2025-09-08
- Updated at
- 2026-01-14 10:32:49 +0900
Surface modification of aluminum on a silicon chip by citric acid treatment
- Journal article
- Creator
-
;Moataz Mekawy (author) (Search by this author);Kazuya Iida (author) (Search by this author)Akitsu Shigetou (author) (Search by this author)
;
Jin Kawakita (author) (Search by this author)
- Keyword
- Aluminum, Surface treatment, Citric acid, Sensor, Moisture
- Date published
- 2025-08-18
- Updated at
- 2025-08-25 12:30:35 +0900
傾斜機能を発現させるための接合手法
- Book
- Creator
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重藤 暁津 (author) (Search by this author)構造材料研究センター/材料創製分野/スマートインターフェイスグループ, 物質・材料研究機構
- Keyword
- 接合, 低温大気圧, 信頼性, 界面設計
- Date published
- 2024-02-15
- Updated at
- 2025-02-06 12:31:08 +0900