Keyword: HVPE

3 records found.

J_Appl_Phys_139_075302_(2026).pdf
Halide vapor phase epitaxy of a thick c -plane α-Ga2O3 film on a high-quality α-Cr2O3/sapphire template
Journal article
Creator
ORCID SAMURAI ; ORCID SAMURAI ;
Shiyu Xiao (author) (Search by this author)
ORCID ;
Kazuto Murakami (author) (Search by this author)
;
Katsuhiro Imai (author) (Search by this author)
;
Takahiro Tomita (author) (Search by this author)
Keyword
Ga2O3, HVPE, Cr2O3
Date published
2026-02-21
Updated at
2026-02-18 16:30:15 +0900

Hydride vapor phase epitaxy and characterization of highquality ScN epilayers.pdf
Hydride Vapor Phase Epitaxy and characterization of High-Quality ScN epilayers
Journal article
Creator
ORCID SAMURAI ;
Encarnación G. Víllora (author) (Search by this author)
; ORCID SAMURAI
Keyword
ScN, HVPE
Date published
2014-04-21
Updated at
2024-01-30 16:35:16 +0900

Maskless_230605_clean.pdf
Reduction of dislocation density in α-Ga2O3 epilayers via rapid growth at low temperatures by halide vapor phase epitaxy
Journal article
Creator
Yuichi Oshima (author) (Search by this author)
ORCID SAMURAI ;
Hiroyuki Ando (author) (Search by this author)
;
Takashi Shinohe (author) (Search by this author)
Keyword
α-Ga2O3, dislocation, HVPE
Date published
2023-06-01
Updated at
2024-06-23 08:30:11 +0900