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Resource type
Journal article(3)
Keyword
HVPE (3)
Cr2O3 (1)
Ga2O3 (1)
ScN (1)
dislocation (1)
α-Ga2O3 (1)
(more)
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In Copyright (2)
Creative Commons BY Attribution 4.0 International (1)
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application/pdf (3)
Keyword: HVPE
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3 records found.
Halide vapor phase epitaxy of a thick
c
-plane α-Ga2O3 film on a high-quality α-Cr2O3/sapphire template
Journal article
Creator
Yuichi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Takayoshi Oshima
(author) (
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)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Shiyu Xiao
(author) (
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)
https://orcid.org/0009-0007-0382-0396
(unauthenticated)
Shiyu Xiao
;
Kazuto Murakami
(author) (
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)
Kazuto Murakami
;
Katsuhiro Imai
(author) (
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)
Katsuhiro Imai
;
Takahiro Tomita
(author) (
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)
Takahiro Tomita
Keyword
Ga2O3
,
HVPE
,
Cr2O3
Date published
2026-02-21
Updated at
2026-02-18 16:30:15 +0900
Hydride Vapor Phase Epitaxy and characterization of High-Quality ScN epilayers
Journal article
Creator
Yuichi Oshima
(author) (
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)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Encarnación G. Víllora
(author) (
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)
Encarnación G. Víllora
;
Kiyoshi Shimamura
(author) (
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)
https://orcid.org/0000-0001-6502-8731
NIMS Researchers Directory SAMURAI
Kiyoshi Shimamura
Keyword
ScN
,
HVPE
Date published
2014-04-21
Updated at
2024-01-30 16:35:16 +0900
Reduction of dislocation density in α-Ga2O3 epilayers via rapid growth at low temperatures by halide vapor phase epitaxy
Journal article
Creator
Yuichi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8293-4891
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Hiroyuki Ando
(author) (
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)
Hiroyuki Ando
;
Takashi Shinohe
(author) (
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)
Takashi Shinohe
Keyword
α-Ga2O3
,
dislocation
,
HVPE
Date published
2023-06-01
Updated at
2024-06-23 08:30:11 +0900
Keyword
HVPE
(3)
Cr2O3
(1)
Ga2O3
(1)
ScN
(1)
dislocation
(1)
α-Ga2O3
(1)
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