6 records found.
HCl-gas etching of (001) β-Ga2O3 under oxygen supply
- Article
- Creator
-
Yuichi Oshima
;
Takayoshi Oshima
- Keyword
- Ga2O3, etching, plasma-free
- Date published
- 2025-12-31
- Updated at
- 2025-09-04 12:30:19 +0900
1D Crystallographic Etching of Few‐Layer WS2
- Article
- Creator
-
Shisheng Li
;
Yung‐Chang Lin
;
Yiling Chiew
;
Yunyun Dai
;
Zixuan Ning
;
Yaming Zhang
;
Hideaki Nakajima
;
Hong En Lim
;
Jing Wu
;
Yasuhisa Neitoh
;
Toshiya Okazaki
;
Yang Sun
;
Zhipei Sun
;
Kazu Suenaga
;
Yoshiki Sakuma
;
Kazuhito Tsukagoshi
;
Takaaki Taniguchi
- Keyword
- 1D nanotrenches, etching, photoluminescence, second harmonic generation, transition metal dichalcogenides
- Date published
- 2024-10-03
- Updated at
- 2024-11-20 16:30:24 +0900
Formation of GaN mesas with reverse-tapered edge structures on a lattice-matched AlInN layer for a positive beveled edge termination
- Article
- Creator
-
Takayoshi Oshima
;
Masataka Imura
;
Yuichi Oshima
- Keyword
- GaN, AlInN, etching, positive bevel edge termination
- Date published
- 2024-08-01
- Updated at
- 2024-08-02 12:30:52 +0900
Plasma-free dry etching of (001) β-Ga2O3 substrates by HCl gas
- Article
- Creator
-
Takayoshi Oshima
;
Yuichi Oshima
- Keyword
- Ga2O3, etching, HCl
- Date published
- 2023-04-17
- Updated at
- 2024-05-29 08:30:12 +0900
Visualization of threading dislocations in an α-Ga2O3 epilayer by HCl gas etching
- Article
- Creator
-
Yuichi Oshima
;
Shingo Yagyu
;
Takashi Shinohe
- Keyword
- α-Ga2O3, dislocation, etching
- Date published
- 2021-10-19
- Updated at
- 2024-01-22 09:38:31 +0900
Effect of temperature and HCl partial pressure on the selective area gas etching of (001) β-Ga2O3
- Article
- Creator
-
Yuichi Oshima
;
Takayoshi Oshima
- Keyword
- β-Ga2O3, etching
- Date published
- 2023-08-01
- Updated at
- 2024-08-21 08:30:30 +0900