Keyword: atomic layer deposition
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Adv Funct Materials - 2025 - Byloff - From Mechanics to Electronics Influence of ALD Interlayers on the Multiaxial.pdf
From Mechanics to Electronics: Influence of ALD Interlayers on the Multiaxial Electro‐Mechanical Behavior of Metal–Oxide Bilayers
Journal article
Creator
Johanna Byloff (author) (Search by this author)
ORCID ;
Vivek Devulapalli (author) (Search by this author)
ORCID ;
Daniele Casari (author) (Search by this author)
ORCID ; ORCID SAMURAI ;
Claus O. W. Trost (author) (Search by this author)
ORCID ;
Megan J. Cordill (author) (Search by this author)
ORCID ;
Shuhel Altaf Husain (author) (Search by this author)
ORCID ;
Pierre‐Olivier Renault (author) (Search by this author)
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Damien Faurie (author) (Search by this author)
ORCID ;
Barbara Putz (author) (Search by this author)
ORCID
Keyword
atomic layer deposition, electromechanical properties, flexible polymer substrates, tensile testing, thin films
Date published
2025-11-27
Updated at
2026-01-20 11:54:44 +0900
ChemMater36_6139_2024.pdf
Effects of Plasma Reactants on Atomic Layer Deposition of Lithium Phosphate and Lithium Phosphorus Oxynitride Electrolyte Films
Journal article
Creator
Tohru Tsuruoka (author) (Search by this author)
National Institute for Materials Science
ORCID SAMURAI ;
Samapika Mallik (author) (Search by this author)
ORCID ;
Takuji Tsujita (author) (Search by this author)
;
Yuu Inatomi (author) (Search by this author)
;
Kazuya Terabe (author) (Search by this author)
National Institute for Materials Science
ORCID SAMURAI
Keyword
atomic layer deposition, lithium phosphate, lithium phosphorus oxynitride, solid-state electrolyte, plasma reactant
Date published
2024-06-25
Updated at
2025-06-25 08:30:22 +0900