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Electrically integrable, high-sensitivity, and high-reliability magnetic sensors are not yet realized at high temperatures (500 °C). In this study, an integrated on-chip single-crystal diamond (SCD) micro-electromechanical system (MEMS) magnetic transducer is demonstrated by coupling SCD with a large magnetostrictive FeGa film. The FeGa film is multifunctionalized to actuate the resonator, self-sense the external magnetic field, and electrically readout the resonance signal. The on-chip SCD MEMS transducer shows a high sensitivity of 3.2 Hz mT−1 from room temperature to 500 °C and a low noise level of 9.45 nT Hz−1/2 up to 300 °C. The minimum fluctuation of the resonance frequency is 1.9 × 10−6 at room temperature and 2.3 × 10−6 at 300 °C. An SCD MEMS resonator array with parallel electric readout is subsequently achieved, thus providing a basis for the development of magnetic image sensors. The present study facilitates the development of highly integrated on-chip MEMS resonator transducers with high performance and high thermal stability.

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  This is the peer reviewed version of the following article: On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film, which has been published in final form at https://doi.org/10.1002/adfm.202300805. This article may be used for non-commercial purposes in accordance with Wiley Terms and Conditions for Use of Self-Archived Versions. This article may not be enhanced, enriched or otherwise transformed into a derivative work, without express permission from Wiley or by statutory rights under applicable legislation. Copyright notices must not be removed, obscured or modified. The article must be linked to Wiley’s version of record on Wiley Online Library and any embedding, framing or otherwise making available the article or pages thereof by third parties from platforms, services and websites other than Wiley Online Library must be prohibited.

Keyword: Diamond, MEMS, Magnetic sensors

Date published: 2023-03-27

Publisher: Wiley

Journal:

• ADVANCED FUNCTIONAL MATERIALS (ISSN: 1616301X) vol. 33 issue. 27 p. 2300805-2300805

Funding:

Manuscript type: Author's version (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.4273

First published URL: https://doi.org/10.1002/adfm.202300805

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Updated at: 2024-07-04 16:30:34 +0900

Published on MDR: 2024-07-04 16:30:35 +0900