On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film

論文

著者

Zilong Zhang ; Wen Zhao ; Guo Chen ; Masaya Toda ; Satoshi Koizumi ; Yasuo Koide ; Meiyong Liao

キーワード

Diamond, MEMS, Magnetic sensors

刊行年月日

2023-03-27

更新時刻

2024-07-04 16:30:34 +0900