@misc{zilong2023a,
  title = {On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film},
  author = {Zilong Zhang, Wen Zhao, Guo Chen, Masaya Toda, Satoshi Koizumi, Yasuo Koide, Meiyong Liao},
  publisher = {Wiley},
  year = {2023-03-27},
  keywords = {Diamond, MEMS, Magnetic sensors}
}