Elaheh Ahmadi
;
Yuichi Oshima
(National Institute for Materials Science)
Alternative title: パワーデバイスに向けたα- および β- Ga2O3の開発
Description:
(abstract)パワーデバイスに向けたα- および β- Ga2O3の材料およびデバイス開発の最新状況を概観する。
Rights:
This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Elaheh Ahmadi et al., J. Appl. Phys. 126, 160901 (2019) and may be found at https://doi.org/10.1063/1.5123213.
Keyword: Ga2O3, power device, epitaxy
Date published: 2019-10-28
Publisher: AIP Publishing
Journal:
Funding:
Manuscript type: Publisher's version (Version of record)
MDR DOI:
First published URL: https://doi.org/10.1063/1.5123213
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Updated at: 2024-01-29 15:08:11 +0900
Published on MDR: 2024-01-29 16:30:09 +0900
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Materials issues and devices of α- and β-Ga2O3.pdf
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