Article Optical properties of single-crystal diamond MEMS: mitigating substrate interference

Keyun Gu ORCID ; Zilong Zhang ; Zhaozong Zhang ORCID ; Jian Huang ; Yasuo Koide SAMURAI ORCID ; Satoshi Koizumi SAMURAI ORCID ; Meiyong Liao SAMURAI ORCID

4.29 Characterization of diamond MEMS cantilevers mitigating substrate interference effects _Liao.docx
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Keyun Gu, Zilong Zhang, Zhaozong Zhang, Jian Huang, Yasuo Koide, Satoshi Koizumi, Meiyong Liao. Optical properties of single-crystal diamond MEMS: mitigating substrate interference. Functional Diamond. 2025, 5 (1), 2570362. https://doi.org/10.1080/26941112.2025.2570362

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(abstract)

The precise characterization of bulk properties of thin homoepitaxial diamond layers with micrometer thickness is difficult due to the interference from the substrate. In this work, we utilized smart-cut method to fabricate single-crystal diamond (SCD) cantilevers or plates and transferred them to a foreign substrate (SiO2/Si). The mechanical resonance of the SCD cantilevers was characterized to confirm that the ion-implantation-induced damaged layer was nearly removed under the cantilever. Raman, photoluminescence (PL), and cathodoluminescence (CL) measurements were conducted on the transferred SCD cantilevers/plates and homoepitaxial layers on the substrate with and without ion implantation. As a result, it was found that both of the Raman spectral properties of the SCD layer on the ion-implanted regions and the freestanding SCD plates/cantilevers successfully avoid interference from the substrate. PL analysis showed no emission peaks attributable to nitrogen and other defects from the epilayers. Additionally, CL analysis from the freestanding cantilevers/plates disclosed the exciton emission at around 236 nm at room temperature. These results suggest the high crystal quality of the SCD cantilevers for MEMS applications.

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Keyword: Diamond, MEMS

Date published: 2025-12-31

Publisher: Informa UK Limited

Journal:

  • Functional Diamond (ISSN: 26941112) vol. 5 issue. 1 2570362

Funding:

  • JSPS KAKENHI 24KF0085
  • JSPS KAKENHI 24H00287
  • JSPS KAKENHI 22K18957
  • Advanced Research Infrastructure for Materials and Nanotechnology in Japan (ARIM) of MEXT JPMXP1224NM5055
  • China Scholarship Council 202306890007

Manuscript type: Author's version (Submitted manuscript)

MDR DOI: https://doi.org/10.48505/nims.5828

First published URL: https://doi.org/10.1080/26941112.2025.2570362

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Updated at: 2025-10-28 12:30:30 +0900

Published on MDR: 2025-10-28 12:16:22 +0900

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