@misc{keyun2025a,
  title = {Optical properties of single-crystal diamond MEMS: mitigating substrate interference},
  author = {Keyun Gu, Zilong Zhang, Zhaozong Zhang, Jian Huang, Yasuo Koide, Satoshi Koizumi, Meiyong Liao},
  publisher = {Informa UK Limited},
  year = {2025-12-31},
  keywords = {Diamond, MEMS}
}