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MEMS resonators are typically engineered to function at their first vibration mode, and extensive research has been dedicated to understanding and optimizing this fundamental mode. However, despite the demonstrated effectiveness of operating at high modes for achieving high sensitivity in MEMS sensing applications, there is currently no reported research on higher-order modes at high temperatures. This paper reports an investigation on the resonance properties of higher-order vibration modes of single crystal diamond (SCD) MEMS, specifically focusing on their performance at elevated temperatures up to 500°C. It is shown that the second mode of SCD cantilever exhibits a high-quality factor of 9,541 and high thermal stability of frequency less than 10 ppm/°C at 500°C.

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• In Copyright
  

Keyword: Diamond, MEMS

Date published: 2024-05-02

Publisher: IEEE

Journal:

• 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) (ISSN: 24743755) p. 1-4

Conference:

Funding:

• China Scholarship Council

Manuscript type: Author's version (Submitted manuscript)

MDR DOI: https://doi.org/10.48505/nims.4839

First published URL: https://doi.org/10.1109/nems60219.2024.10639909

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Updated at: 2024-10-11 16:30:28 +0900

Published on MDR: 2024-10-11 16:30:28 +0900