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説明:

MEMS resonators are typically engineered to function at their first vibration mode, and extensive research has been dedicated to understanding and optimizing this fundamental mode. However, despite the demonstrated effectiveness of operating at high modes for achieving high sensitivity in MEMS sensing applications, there is currently no reported research on higher-order modes at high temperatures. This paper reports an investigation on the resonance properties of higher-order vibration modes of single crystal diamond (SCD) MEMS, specifically focusing on their performance at elevated temperatures up to 500°C. It is shown that the second mode of SCD cantilever exhibits a high-quality factor of 9,541 and high thermal stability of frequency less than 10 ppm/°C at 500°C.

権利情報:

• In Copyright
  

キーワード: Diamond, MEMS

刊行年月日: 2024-05-02

出版者: IEEE

掲載誌:

• 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) (ISSN: 24743755) p. 1-4

会議:

研究助成金:

• China Scholarship Council

原稿種別: 査読前原稿 (Author's original)

MDR DOI: https://doi.org/10.48505/nims.4839

公開URL: https://doi.org/10.1109/nems60219.2024.10639909

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更新時刻: 2024-10-11 16:30:28 +0900

MDRでの公開時刻: 2024-10-11 16:30:28 +0900