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Specimen set tesim
ala
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Auger Depth Profile Analysis of GaAs/AIAs Thin Film by Synthesized Spectrum Method Usi...
Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at th...
High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Hol...
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Type of work
Publication
3
Keyword
Auger Depth Profiling Analysis
2
GaAs/AlAs Superlattice
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Inclined Holder
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Si/Ge multiple delta-doped layers
2
Auger depth profiling analysis
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Japanese
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Surface Analysis Society of Japan
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Surface Science Society of Japan
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The Surface Science Society of Japan
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Article
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open
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In Copyright
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Material/Specimen
GaAs/AlAs Superlattice
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GaAs/AlAs Superlattice and Si/Ge multiple delta-doped layers
1
GaAs/AlAs multilayer
1
Si/Ge multiple delta-doped layers
1
Author
Kim, Kyung Joong
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Nagatomi, Takaharu
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Ogiwara, Toshiya
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Tanuma, Shigeo
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OGIWARA, Toshiya
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Journal
Journal of The Surface Science Society of Japan
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Journal of Surface Analysis
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