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電子分光法における表面定量分析の標準化の歩み

Description/Abstract:

AESやXPSに代表される表面電子分光法における定量化は, 1982年のVAMAS プロジェクト TWA-2 SCAの設立と1991年のISO TC201SCAの設立が２つの大きな転換点といえる。前者では，個々人の定量研究から国際共同研究を通して，定量の信頼性や正確性・遡及...

Keyword:

ISO, 国際標準化, 標準化の意味, 標準化の歴史, and 表面定量分析

Resource Type:

Presentation

Author:

田沼繁夫

Date Uploaded:

26/06/2023
Summary of ISO/TC 201 Standard: XX ISO 18118: 2004 — Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy —Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials

Description/Abstract:

ISO 18118 provides guidance on the measurement and use of experimentally determined relative sensitivity factors for the quantitative ana...

Keyword:

AES, Auger electron spectroscopy, ISO, International Organization for Standardization, X-ray photoelectron spectroscopy, XPS, quantitative surface analysis, and relative sensitivity factor

Resource Type:

Article

Author:

TANUMA, Shigeo

Journal:

Surface and Interface Analysis

Date Uploaded:

08/10/2020

Date Modified:

01/07/2021