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Raw data files for Fig. 12 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:

We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...

Keyword:

Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam

Resource Type:

Dataset

Data origin:

experiments

Author:

OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki

Date Uploaded:

07/08/2023
Raw data files for Fig. 11 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:

We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...

Keyword:

Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam

Resource Type:

Dataset

Data origin:

experiments

Author:

OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki

Date Uploaded:

13/07/2023

Date Modified:

07/08/2023
Raw data files for Fig. 10 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:

We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...

Keyword:

Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam

Resource Type:

Dataset

Data origin:

experiments

Author:

OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki

Date Uploaded:

23/06/2023

Date Modified:

18/07/2023
Raw data files for Fig. 9 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:

We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...

Keyword:

Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam

Resource Type:

Dataset

Data origin:

experiments

Author:

OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki

Date Uploaded:

29/05/2023

Date Modified:

26/06/2023
Raw data files for Fig. 6 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:

We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...

Keyword:

Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam

Resource Type:

Dataset

Data origin:

experiments

Author:

OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki

Date Uploaded:

09/02/2023

Date Modified:

30/03/2024
Raw data files for Fig. 7 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:

We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...

Keyword:

Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam

Resource Type:

Dataset

Data origin:

experiments

Author:

OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki

Date Uploaded:

21/12/2022

Date Modified:

09/02/2023
Raw data files for Fig. 8 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:

We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...

Keyword:

Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam

Resource Type:

Dataset

Data origin:

experiments

Author:

OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki

Date Uploaded:

22/11/2022

Date Modified:

30/05/2023
NITE 高分子破壊データベース破壊靱性試験・引張試験

Description/Abstract:

NITE高分子破壊データベースは、独立行政法人製品評価技術基盤機構（以下NITEという。）で計測されたデータを公表するものです。データベースの著作権は、NITEが所有しています。データベースのデータを転載、引用する場合は、独立行政法人製品評価技術基盤機構（NITE）...

Keyword:

fracture, plastic, and polymer

Resource Type:

Dataset

Data origin:

experiments

Author:

National Institute of Technology and Evaluation

Date Uploaded:

26/11/2020

Date Modified:

02/12/2020
NITE 高分子破壊データベース試験条件

Description/Abstract:

NITE高分子破壊データベースは、独立行政法人製品評価技術基盤機構（以下NITEという。）で計測されたデータを公表するものです。データベースの著作権は、NITEが所有しています。データベースのデータを転載、引用する場合は、独立行政法人製品評価技術基盤機構（NITE）...

Keyword:

fracture, plastic, and polymer

Resource Type:

Dataset

Data origin:

experiments

Author:

National Institute of Technology and Evaluation

Date Uploaded:

22/10/2020

Date Modified:

02/12/2020
NITE 高分子破壊データベース疲労試験

Description/Abstract:

NITE高分子破壊データベースは、独立行政法人製品評価技術基盤機構（以下NITEという。）で計測されたデータを公表するものです。データベースの著作権は、NITEが所有しています。データベースのデータを転載、引用する場合は、独立行政法人製品評価技術基盤機構（NITE）...

Keyword:

fatigue, fracture, plastic, and polymer

Resource Type:

Dataset

Data origin:

experiments

Author:

National Institute of Technology and Evaluation

Date Uploaded:

22/10/2020

Date Modified:

02/12/2020

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Limit your search

Type of work

Dataset25

Collection

READS: Database of Promising Adsorbents for Decontamination of Radioactive Substances10
READS: 放射性物質の除去・回収技術のためのデータベース10
NITE 高分子破壊データベース6

Keyword

READS10
Auger depth profiling analysis7
HfO2/Si7
Ultra low angle incidence ion beam7
fracture6
more Keywords »

Publisher

National Institute for Materials Science6

Resource type

Dataset23
Image2

Visibility

open25

Rights Statement Sim

In Copyright[remove]25

Data origin

experiments[remove]25

Properties addressed

chemical10
mechanical3
mechanical -- fatigue1
mechanical -- fracture toughness1
mechanical -- tensile response1

Synthesis and processing

forming5

Characterization methods

spectroscopy7
mechanical4
mechanical -- creep tests1

Material/Specimen

Layered Silicates2
zeolites2
layered double hydroxides1
mesoporous material1
アクリロニトリルブタジエンスチレン1

Date created

20021

Date updated

20136
20121

Date

201110
20025
20152

Creator

TODOROKI, Shin-ichi2

Author

National Institute for Materials Science8
NAGATA, Takahiro7
OGIWARA, Toshiya7
YOSHIKAWA, Hideki7
Central Research Institute of Electric Power Industry6
more Authors »

Contact person

National Institute for Materials Science10

License

http://rightsstatements.org/vocab/InC/1.0/16

Instrument model number

CP6L250,CP6L250S1
EHF-ED50KN-10Ｌ1

Instrument managing organization

National Institute of Technology and Evaluation2

National Institute for Materials Science

Research Network and Facility Services Division (RNFS)
Materials Data Platform

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