Index Catalog // MDR

Calculations of Electron Inelastic Mean Free Paths (IMFPs). XIV. Calculated IMFPs for LiF and Si3N4 and Development of an Improved Predictive IMFP Formula

Description/Abstract:: We report inelastic mean free paths (IMFPs) of Si3N4 and LiF for electron energies from 50 eV to 200 keV that were calculated from their ...
Keyword:: IMFP, Improved Predictive IMFP Formula, JTP equation, TPP-2M, and electron inelastic mean free path
Resource Type:: Article
Author:: Jablonski, Aleksander, Tanuma, Shigeo, and Powell, C. Cedric
Journal:: Surface and Interface Analysis
Date Uploaded:: 29/05/2023
Date Modified:: 06/06/2023

表面電子分光法における信号の減衰はいかに記述されるか？ II. 誘電関数とIMFP

Description/Abstract:: 表面電子分光法では電子および光と物質の相互作用は非常に重要であり，信号の減衰を理解するのに不可欠である。そこで，これらの相互作用を統一的に考えるために誘電関数，エネルギー損失関数を導入し，光・電子と物質の相互作用について解説する。また，発生した電子を検出する表面電子分光法で...
Keyword:: electron inelastic mean free paths, surface electron spectroscopy, dielectric function, and energy loss function
Resource Type:: Article
Author:: Tanuma, Shigeo
Journal:: Journal of Surface Analysis
Date Uploaded:: 27/06/2022
Date Modified:: 01/07/2022

Calculations of electron inelastic mean free paths. XIII. Data for 14 organic compounds and water over the 50 eV to 200 keV range with the relativistic full Penn algorithm.

Description/Abstract:: We have calculated inelastic mean free paths (IMFPs) for 14 organic compounds (26-n-paraffin, adenine, β-carotene, diphenyl-hexatriene, g...
Keyword:: IMFP, electron inelastic mean free paths, organic compounds, FPA, bandgap correction, and liquid water
Material/Specimen:: 26-n-paraffin, adenine, polystyrene, poly(2-vinylpridine), thymine, uracil, liquid water, β-carotene, diphenyl-hexatriene, guanine, Kapton, polyacetylene, poly(butene-1-sulfone), polyethylene, and polymethylmethacrylate
Resource Type:: Article
Author:: Shinotsuka, Hiroshi, Tanuma, Shigeo, and Powell, CJ
Journal:: SURFACE AND INTERFACE ANALYSIS
Date Uploaded:: 11/04/2022
Date Modified:: 13/04/2022

Calculations of electron inelastic mean free paths. IX. Data for 41 elemental solids over the 50 eV to 30 keV range

Description/Abstract:: We have calculated inelastic mean free paths (IMFPs) for 41 elemental solids (Li, Be, graphite, diamond, glassy C, Na, Mg, Al, Si, K,Sc,T...
Keyword:: electron inelastic mean free paths, IMFP, elemental solids, and TPP-2M
Material/Specimen:: elemental solids
Resource Type:: Article
Author:: Tanuma, Shigeo, Powell, C. J., and Penn, D. R.
Journal:: SURFACE AND INTERFACE ANALYSIS
Date Uploaded:: 01/11/2021
Date Modified:: 16/12/2021

Calculation of Electron Inelastic Mean Free Paths (IMFPs). VII. Reliability of the TPP-2M IMFP Predictive Equation

Description/Abstract:: We report comparisons of electron inelastic mean free paths (IMFPs) determined from our predictive IMFP equation TPP-2M and reference IMF...
Keyword:: electron inelastic mean free paths, IMFP, IMFPs, TPP-2M, number of valence electrons, elemental solids, and surface sensitivity
Resource Type:: Article
Author:: Tanuma, Shigeo, Powell, C. J., and Penn, D. R.
Journal:: SURFACE AND INTERFACE ANALYSIS
Date Uploaded:: 01/11/2021
Date Modified:: 04/01/2022

Experimental Determination of Electron Inelastic Mean Free Paths in 13 Elemental Solids in the 50 eV to 5000 eV Energy Range by Elastic-Peak Electron Spectroscopy

Description/Abstract:: We have determined electron inelastic mean free paths (IMFPs) in C (graphite), Si, Cr, Fe, Cu, Zn, Ga, Mo, Ag, Ta, W, Pt and Au by elasti...
Keyword:: electron inelastic mean free paths, experimental determination, elastic- peak electron spectroscopy, and Monte Carlo simulation
Material/Specimen:: C (graphite), Si, Cr, Fe, Cu, Zn, Ga, Mo, Ag, Ta, W, Pt and Au
Resource Type:: Article
Author:: Tanuma, Shigeo, Shiratori, T, Kimura, Takashi, Goto, Keisuke, Ichimura, Shingo, and Powell, Cedric J
Journal:: SURFACE AND INTERFACE ANALYSIS
Date Uploaded:: 04/10/2021
Date Modified:: 18/10/2021

Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy. Effects of Zalar Rotation and Liquid Nitrogen Cold Stage

Description/Abstract:: We have investigated the Auger depth profiling analysis of InP/GaInAsP multilayer specimens. It is difficult to obtain the Auger depth pr...
Keyword:: Auger Depth Profiling Analysis, InP/GaInAsP Multilayers, Zalar Rotation Method, and Sample Cooling Method
Material/Specimen:: InP/GaInAsP Multilayers
Resource Type:: Article
Author:: Ogiwara, Toshiya, Tanuma, Shigeo, Nagasawa, Yuji, and Ikeo, Nobuyuki
Journal:: Journal of The Surface Science Society of Japan
Date Uploaded:: 09/09/2021
Date Modified:: 09/09/2021

Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder

Description/Abstract:: We developed a 85°-high-angle inclined specimen holder which enabled the specimen surface to be irradiated by both electron and ion beams...
Keyword:: Auger Depth Profiling Analysis, Inclined Holder, GaAs/AlAs Superlattice, and Si/Ge multiple delta-doped layers
Material/Specimen:: GaAs/AlAs Superlattice and Si/Ge multiple delta-doped layers
Resource Type:: Article
Author:: Ogiwara, Toshiya, Nagatomi, Takaharu, Kim, Kyung Joong, and Tanuma, Shigeo
Journal:: Journal of The Surface Science Society of Japan
Date Uploaded:: 08/09/2021
Date Modified:: 08/09/2021

InP/GaInAs多層膜のAES深さ方向分析のラウンドロビン試験報告（I）

Description/Abstract:: AES深さ方向分析の標準化を進めるために，InP/GaInAs多層膜を用いたデプスプロファイル測定のラウンドロビン試験を行った．参加した２３機関の装置は３社に分類され，その仕様が異なるため，測定条件は電子線およびイオンの加速電圧を3kVに固定して，その他の条件は各機関に一任...
Keyword:: Auger Depth Profiling Analysis, InP/GaInAs Specimen, and Round Robin Test
Material/Specimen:: InP/GaInAs Multilayer
Resource Type:: Article
Author:: Ogiwara, Toshiya and Tanuma, Shigeo
Journal:: Journal of Surface Analysis
Date Uploaded:: 29/07/2021
Date Modified:: 02/08/2021

試料冷却法を併用したAES深さ方向分析によるSiO2/Si熱酸化膜の分析

Description/Abstract:: 試料冷却法を併用したAES深さ方向分析によるSiO2/Si熱酸化膜の分析について検討を行った．分析時の試料保持温度を常温および-190℃として，それぞれの温度について電子線電流密度を３段階に変えてデプスプロファイルを取得した．イオン加速電圧は3kVである．また，測定したオー...
Keyword:: Auger Depth Profiling Analysis, Sample Cooling Method, and SiO2/Si
Material/Specimen:: SiO2:103nm/Si-Substrate
Resource Type:: Article
Author:: Ogiwara, Toshiya and Tanuma, Shigeo
Journal:: Journal of Surface Analysis
Date Uploaded:: 26/07/2021
Date Modified:: 26/07/2021

Calculations of Electron Inelastic Mean Free Paths (IMFPs). XIV. Calculated IMFPs for LiF and Si3N4 and Development of an Improved Predictive IMFP Formula

表面電子分光法における信号の減衰はいかに記述されるか？ II. 誘電関数とIMFP

Calculations of electron inelastic mean free paths. XIII. Data for 14 organic compounds and water over the 50 eV to 200 keV range with the relativistic full Penn algorithm.

Calculations of electron inelastic mean free paths. IX. Data for 41 elemental solids over the 50 eV to 30 keV range

Calculation of Electron Inelastic Mean Free Paths (IMFPs). VII. Reliability of the TPP-2M IMFP Predictive Equation

Experimental Determination of Electron Inelastic Mean Free Paths in 13 Elemental Solids in the 50 eV to 5000 eV Energy Range by Elastic-Peak Electron Spectroscopy

Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy. Effects of Zalar Rotation and Liquid Nitrogen Cold Stage

Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder

InP/GaInAs多層膜のAES深さ方向分析のラウンドロビン試験報告（I）

試料冷却法を併用したAES深さ方向分析によるSiO2/Si熱酸化膜の分析

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