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OGIWARA, Toshiya
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Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam
Description/Abstract:
It is very difficult to obtained the Auger depth profile of InP multilayer structures with argon ion sputtering because the very large su...
Keyword:
Auger Depth Profiling Analysis
,
Argon Ion Spot Beam
, and
InP/GaInAsP Multilayer Specimen
Material/Specimen:
InP/GaInAsP Multilayer
Resource Type:
Article
Author:
OGIWARA, Toshiya
,
HARADA, Tomoko
, and
TANUMA, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
01/10/2021
Date Modified:
01/10/2021
Raw data files for Fig. 6 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Description/Abstract:
We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:
Auger depth profiling analysis
,
HfO2/Si
, and
Ultra low angle incidence ion beam
Resource Type:
Dataset
Data origin:
experiments
Author:
OGIWARA, Toshiya
,
NAGATA, Takahiro
, and
YOSHIKAWA, Hideki
Date Uploaded:
09/02/2023
Date Modified:
30/03/2024
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8
Publication
4
Keyword
Auger depth profiling analysis
11
HfO2/Si
8
Ultra low angle incidence ion beam
8
InP/GaInAsP multilayer specimens
2
Argon Ion Spot Beam
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Japanese
4
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National Institute for Materials Science
7
Surface Science Society of Japan
4
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Dataset
8
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4
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open
12
Rights Statement Sim
In Copyright
12
Data origin
experiments
7
experiment
1
Characterization methods
spectroscopy
8
Material/Specimen
InP/GaInAsP multilayer specimens
2
GaAs/AlAs multilayer
1
InP/GaInAsP Multilayer
1
Author
OGIWARA, Toshiya
[remove]
12
NAGATA, Takahiro
8
YOSHIKAWA, Hideki
8
TANUMA, Shigeo
4
HARADA, Tomoko
1
Journal
Journal of The Surface Science Society of Japan
4